Spatial Distribution and Transport of an Electron Cyclotron Resonance Plasma Generated Using Dominant-Mode Microwave
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-10-15
著者
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Watanabe S
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
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Watanabe S
Division Of Materials Science Graduate School Of Engineering Hokkaido University
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Kawasaki S
Faculty Of Science Saitama University
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Kawasaki Sunao
Faculty Of Science Kanazawa University
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Kawasaki Sunao
Department Of Physics Faculty Of Science Saitama University
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Watanabe Seiichi
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
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Kawasaki Satoshi
Personal Computer And Communications Development Laboratories Nec Corporation
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Usui T
Hitachi Ltd. Ibaraki Jpn
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WATANABE Seiichi
Mechanical Engineering Research Laboratory, Hitachi Ltd.
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FURUSE Muneo
Mechanical Engineering Research Laboratory, Hitachi Ltd.
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USUI Takehito
Mechanical Engineering Research Laboratory, Hitachi Ltd.
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Katsuda Shinichi
Personal Computers & Communications Development Laboratories Nec Corporation
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WATANABE Shigeya
Department of Engineering Physics, Faculty of Engineering, Kyoto University
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Watanabe Seiichi
Mechanical Engineering Research Laboratory Hitachi L.t.d.
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Usui Takehito
Mechanical Engineering Research Laboratory Hitachi Ltd.
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