Fabrication of Ferroelectric Pb(Zr, Ti)O_3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition(Surfaces, Interfaces, and Films)
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-01-15
著者
-
塩嵜 忠
奈良先端科学技術大学院大学物質創成科学研究科
-
Miyake Masato
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
-
SHIOSAKI Tadashi
Graduate School of Materials Science, Nara Institute of Science and Technology
-
OKAMURA Soichiro
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
-
Okamura S
Nara Inst. Sci. And Technol. (naist) Nara Jpn
-
Okamura Soichiro
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
-
Okamura Soichiro
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
-
Kawasaki S
Faculty Of Science Saitama University
-
Kawasaki Sunao
Faculty Of Science Kanazawa University
-
Kawasaki Sunao
Department Of Physics Faculty Of Science Saitama University
-
Shiosaki Tadashi
Research Development Division Sakai Chemical Industry Co. Ltd.
-
Kawasaki Satoshi
Personal Computer And Communications Development Laboratories Nec Corporation
-
Shiosaki Tadashi
Graduate School Of Materials Science Nara Institute Of Science And Technology
-
Ueda Yoshiki
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
-
LEE Kyungho
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
-
KAWASAKI Susumu
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
-
Lee Kyungho
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
-
Katsuda Shinichi
Personal Computers & Communications Development Laboratories Nec Corporation
-
Miyake Masato
Graduate School Of Agricultural Science Tohoku University
-
Shiosaki Tadashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
関連論文
- Composition dependence of electrooptic property of epitaxial (Pb,La)(Zr,Ti)O3 films
- Effect of a driving electric field waveform on piezoelectric displacement of PZT thick films
- 低対称を有する圧電体単結晶の材料定数評価
- 圧電・超音波材料 希土類Caボレート単結晶の作製と圧電特性--LaCa4O(BO3)3系単結晶の作製と材料定数決定と弾性表面波特性
- P1-2 GdCOB結晶の圧電定数測定と弾性表面波特性の計算機解析(ポスターセッション1(概要講演))
- P2-19 LaCa_4O(BO_3)_3結晶の材料定数評価と弾性表面波特性(ポスターセッション2(概要講演))
- Ca_3Ga_2Ge_4O_型新圧電材料の開発
- 希土類元素を主成分とする圧電材料の開発
- エピタキシャルFe_3O_4ピニング層を用いたスピンバルブ膜の磁気抵抗効果
- Fe_3O_4磁性層を用いた強磁性トンネル接合の結晶方位依存性
- Fe_3O_4磁性層を用いた強磁性トンネル接合の作製
- エピタキシャルRFeO_3反強磁性層を用いたスピンバルブ膜の方位依存性
- 湿式化学法による単分散球状単結晶銀粒子の合成
- 積層セラミックスコンデンサー内部電極用Ag-Pd合金粉末の合成と評価(第1報)
- 23pZD-12 PZT薄膜の熱刺激電流における電圧依存性(23pZD 誘電体,領域10(誘電体,格子欠陥,X線・粒子線,フォノン物性))
- 28aXD-7 PZT薄膜キャパシタの熱-電気伝導特性の評価(28aXD 誘電体,領域10(誘電体,格子欠陥,X線・粒子線,フォノン物性))
- 欧州における電子部品の鉛規制状況と無鉛圧電材料の研究開発動向
- 161.UV照射を応用したCSD法による機能性薄膜の作製((11)光放射の応用・関連計測)
- 上部金属電極の自己整合パターニングを可能とする強誘電体キャパシタ作製プロセス (特集 ナノ・ケモテクノロジーへの招待--奈良先端科学技術大学院大学物質創成科学研究科)
- CoFe_2O_4系スピンバルブ膜のMR特性およびそのアニール温度依存性
- エピタキシャルYFeO_3反強磁性層を用いたスピンバルブ膜の方位依存性
- マイクロエマルションチャーリング法によるBaTiO_3微粒子の合成(第1報)
- 積層セラミックスコンデンサー内部電極用Ag-Pd合金粉末の合成と評価(第2報) : Ag-Pd(70-30)合金粉末のペースト物性評価
- 化学溶液堆積(CSD)法による強誘電体薄膜の作製と電子線誘起反応プロセスによるその微細加工
- 化学溶液堆積(CSD)法による強誘電体薄膜の作製と電子線誘起反応プロセスによるその微細加工
- MO_Bi_Ta_2O_9(M=Na, K) セラミックスの合成及び強誘電特性
- Simple Process Synthesis of BaTiO_3-(Ni,Zn,Cu)Fe_2O_4 Ceramic Composite(Cross-disciplinary physics and related areas of science and technology)
- MOCVD法による強誘電体PZT薄膜の合成とその物性 (特集 酸化物強誘電体薄膜の合成とその物性)
- Estimation of Parasitic Capacitance in Measurement of Hysteresis Properties of Ferroelectric Microcapacitors Using Scanning Probe Microscope
- Evaluation of Material Constants and Temperature Properties in Lanthanum Calcium Oxoborate LaCa_4O(BO_3)_3 Single Crystals
- Growth and Characterization of Lanthanum Calcium Oxoborate LaCa_40(BO_3)_3 Single Crystals
- Thermally Stimulated Current Maeasurement for Degraded Pb(Ti,Zr)O_3 Thin-Film Capacitors
- Increase in Switching Charge of Ferroelectric SrBi_2Ta_2O_9 Thin Films with Polarization Reversal
- Conspicuous Voltage Shift of D-E Hysteresis Loop and Asymmetric Depolarization in Pb-Based Ferroelectric Thin Films
- Preparation of La-Modified Lead Titanate Film Capacitors and Influence of SrRuO_3 Electrodes on the Electrical Properties
- Characterization of Niobium-Doped Lead Titanate Thin Films
- Theoretical Study on Surface Acoustic Wave Characteristics of LiNbO_3 Films on Sapphire Substrates
- In-plane Observations of RF-sputtered LiNbO_3 Thin Films Using an Energy Dispersive Total-Reflection X-Ray Diffractometer
- Influences of Pr and Mn co-substitution on crystallinity and electric properties of BiFeO3 thin films
- Electro-Optic Properties of Lanthanum-Modified Lead Zirconate Titanate Thin Films Epitaxially Grown by the Advanced Sol-Gel Method
- Evaluation of ferroelectric hysteresis loops of leaky multiferroic BiFeO3 films using a system with a high driving frequency of 100 kHz system
- Low Temperature Synthesis of Electrode Films from Silver-Palladium Alloy Powders for Multilayer Ceramic Devices
- Influence of a TiO_2 Adhesion Layer on the Structure and the Orientation of a Pt Layer in Pt/TiO_2/SiO_2/Si Structures
- Preparation of CoFe_2O_4 Spin Valves and Improvement of Their Magnetoresistance Property by Postannealing
- Fabrication of Ferroelectric Microcapacitors with Self-Aligned Top Electrodes by Electron-Beam-Induced Patterning Process
- Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering: Electrical Properties
- Thermally Stimulated Current and Polarization Fatigue in Pb (Zr, Ti) O_3 Thin Films
- Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering : Fabrication and Structure Analyses
- Fabrication of Ferroelectric Pb(Zr,Ti)O3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition Using a Novel Titanium Source Ti(OEt)2(DPM)2
- Variation in 111 d-Space and Generation of Hillocks in Platinum Thin-Film Electrodes by Heat Treatment
- Improvement in Step Coverage of Pb(Zr, Ti)O_3 Thin Films Deposited by Liquid Delivery Metalorganic Chemical Vapor Deposition
- Piezoelectric Properties of Sodium Bismuth Tantalate Na_Bi_Ta_2O_9 Dense Ceramics
- Improvement in Homogeneity and Ferroelectric Property on Mist Deposition Derived Pb(Zr, Ti)O_3 Thin Films by Substrate Surface Treatment
- Investigation of PtNb Alloy Electrodes for Ferroelectric Pb(Zr, Ti)O_3 Thin Film Capacitors
- Fabrication of Ferroelectric Pb(Zr, Ti)O_3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition(Surfaces, Interfaces, and Films)
- Crystal Growth and Characterization of Lanthanum Substituted Bismuth Titanate Single Crystals
- Growth of Ba_2NaNb_5O_ Thin Films on MgO(100) by the Pulsed Laser Ablation Method
- Effects of Postannealing in Oxygen Ambient on Leakage Properties of (Ba, Sr)TiO_3 Thin-Film Capacitors
- Effect of Laser Energy Density on the Fabrication of Ba_2NaNb_5O_ Thin Films by Pulsed Laser Ablation
- Control of the Orientation of Ferroelectric Bi_4Ti_3O_ Thin Films by Multi-step Metal Organic Decomposition Process
- Micropatterning of Ferroelectric Bi_4Ti_3O_ Using Electron-Beam-Induced Reaction of Metal Octylate Films
- Crystallization of Precursor Micropatterns of Ferroelectric Bi_4Ti_3O_ Fabricated by Electron Beam Scanning
- Fabrication of PbTiO_3 Thin Films on TiSi_2/Si and Their Characterization ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Step Coverage Characteristics of Pb(Zr, Ti)O_3 Thin Films on Various Electrode Materials by Metalorganic Chemical Vapor Deposition
- Fabrication of Ferroelectric Bi_4Ti_3O_ Thin Films by Dipping Pyrolysis of Metal Naphthenates and Micropatterns by an Electron Beam ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Structural Analysis of Polycrystalline BiFeO_3 Films by Transmission Electron Microscopy
- Fabrication of Perovskite Manganite (La, Sr)MnO_3 Thin Films by Chemical Solution Deposition and Their Low-Field Magnetoresistance Properties at Room Temperature : Magnetism
- 圧電材料としての希土類カルシウムオキソボレート結晶(材料物性から見たフッ化物・酸化物単結晶の育成技術)
- Growth of BaTiO_3:Ce Single Crystals and Their Properties
- Evaluation of Electrical Properties of Leaky BiFeO3 Films in High Electric Field Region by High-Speed Positive-Up--Negative-Down Measurement
- 電子線誘起反応を用いた強誘電体薄膜の微細加工プロセス (特集 酸化物強誘電体薄膜の合成とその物性)
- 不揮発性メモリー用強誘電体薄膜の分極特性に及ぼす空間電荷の影響 (特集 酸化物強誘電体薄膜の合成とその物性)
- Thermooptic Property of Polycrystalline BiFeO3 Film
- Investigation on Thickness Effect of Ultrathin Vinylidene Fluoride/Trifluoroethylene Copolymer Films
- Influence of SrRuO3 Bottom Electrode Thickness on Electric Properties of (Bi,Pr)(Fe,Mn)O3 Ultra-Thin Film Capacitor
- Estimation of Leakage Current Density and Remanent Polarization of BiFeO3 Films with Low Resistivity by Positive, Up, Negative, and Down Measurements
- Muscle type-specific effect of myostatin deficiency on myogenic regulatory factor expression in adult double-muscled Japanese Shorthorn cattle
- Recrystallization and Microstructure in Electrophoretically Deposited Ferroelectric BaTiO_3 Films under CO_2-Laser Irradiation ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Fabrication of Ferroelectric BaTiO_3 Films by Electrophoretic Deposition
- Properties of Ferroelectric Pb(Zr, Ti)O_3 Thin Films on TiSi_2/Si Substrates
- Ba_2NaNb_5O_ Thin Films Prepared by the Pulsed Laser Ablation Method
- Effects of O_2 Gas Pressure in Heat Treatment on Surface Morphology and Electric Properties of Ferroelectric Bi_4Ti_3O_ Thin Films with c-Axis Orientation
- O_2 Gas Pressure Effects on Surface Morphology in Ferroelectric Bi_4Ti_3O_ Thin Films Fabricated by Spin-Coating Pyrolysis
- Fabrication of Ferroelectric Pb(Zr,Ti)O_3 Thin Films with Various Zr/Ti Ratios by Ink-Jet Printing
- Electric-Field-Induced Polarization Enhancement of Vinylidene Fluoride/Trifluoroethylene Copolymer Ultrathin Films
- 圧電材料としての希土類カルシウムオキソボレート結晶
- Annealing Temperature Dependences of Ferroelectric and Magnetic Properties in Polycrystalline Co-Substituted BiFeO3 Films
- Thermally Stimulated Current Measurement for Degraded Pb(Ti,Zr)O3 Thin-Film Capacitors
- Composition dependence in BiFeO3 film capacitor with suppressed leakage current by Nd and Mn cosubstitution and their ferroelectric properties
- Formation Mechanism of Oriented Pb(Zr,Ti)O3 Thin Films on Platinum Bottom Electrodes from Amorphous Films Prepared by Liquid Delivery Metalorganic Chemical Vapor Deposition
- Fabrication of Ferroelectric Pb(Zr,Ti)O3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition Using a Novel Titanium Source Ti(OEt)2(DPM)2
- Growth and Characterization of Lanthanum Calcium Oxoborate LaCa4O(BO3)3 Single Crystals
- Structural Analyses of Co- and Mn-Substituted BiFeO Polycrystalline Films
- Estimation of Parasitic Capacitance in Measurement of Hysteresis Properties of Ferroelectric Microcapacitors Using Scanning Probe Microscope
- Investigation of PtNb Alloy Electrodes for Ferroelectric Pb(Zr,Ti)O3 Thin Film Capacitors
- Piezoelectric Properties of Sodium Bismuth Tantalate Na0.5Bi2.5Ta2O9 Dense Ceramics
- Influence of a TiO2 Adhesion Layer on the Structure and the Orientation of a Pt Layer in Pt/TiO2/SiO2/Si Structures
- Evaluation of Material Constants and Temperature Properties in Lanthanum Calcium Oxoborate LaCa4O(BO3)3 Single Crystals
- Preparation of CoFe2O4 Spin Valves and Improvement of Their Magnetoresistance Property by Postannealing
- Improvement in Step Coverage of Pb(Zr,Ti)O3 Thin Films Deposited by Liquid Delivery Metalorganic Chemical Vapor Deposition