Fabrication of Ferroelectric Pb(Zr,Ti)O_3 Thin Films with Various Zr/Ti Ratios by Ink-Jet Printing
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概要
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Ferroelectric Pb(Zr,Ti)O_3 (PZT) thin films with various Zr/Ti ratios were fabricated by ink-jet printing (lIP). Two kinds of precursor solutions for PbTiO_3 (PT) and PbZrO_3 (PZ) were prepared from Pb(OCOCH_3)_2 3H_2O, Ti[OCH(CH_3)_2]_4 and Zr(0C4H9)4. Seven lxicm[1] square patterns with mixing ratios PT: PZ =6:0,5:1,4:2,3:3,2:4,1:5 and 0 : 6 were formed on a 3-inch Pt/Ti/SiO_2/Si substrate by overlapped printing. After printing, they were dried at 110℃ for 10mm, calcined at 350℃ for 10mm and finally sintered at 650℃ for 30 mm. The d-space corresponding to the (001) plane in the tetragonal phase estimated from X-ray diffraction (XRD) peaks first decreased, then increased and finally decreased again with increasing Zr-content, while the d-space corresponding to the (100) or (010) plane monotonically increased with increasing Zr-content. This suggests that the crystal structure of PZT thin films changed from tetragonal to rhombohedral to orthorhombic with increasing Zr-content.
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Okamura Soichiro
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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Shiosaki Tadashi
Graduate School Of Materials Science Nara Institute Of Science And Technology
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TAKEUCHI Rie
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
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Takeuchi Rie
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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Shiosaki Tadashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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