Formation Mechanism of Oriented Pb(Zr,Ti)O3 Thin Films on Platinum Bottom Electrodes from Amorphous Films Prepared by Liquid Delivery Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
Ferroelectric Pb(Zr,Ti)O3 (PZT) thin films with 111- and 001/100-orientations were fabricated on silicon substrates covered with platinum (Pt). Amorphous PZT (a-PZT) films were deposited on Pt bottom electrodes by liquid delivery metalorganic chemical vapor deposition and subsequent postannealing by a special heating stage equipped with an X-ray diffraction system. Variations in the 111 $d$-space of Pt and the crystallization behavior of PZT layers were in situ measured in postannealing processes. The existence or absence of lead platinum intermediates in a-PZT layers near Pt bottom electrodes at the beginning of crystallization are suggested to be the key factor for obtaining 111- or 001/100-oriented crystalline PZT thin films.
- 2009-09-25
著者
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NISHIDA Takashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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Okamura Soichiro
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
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Shiosaki Tadashi
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Nakamura Kimitoshi
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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Uchiyama Kiyoshi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Uchiyama Kiyoshi
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Otani Yohei
Department of Electronic System Engineering, Faculty of System Engineering, Tokyo University of Science, Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, Japan
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Otani Yohei
Department of Electronic Systems Engineering, Faculty of Systems Engineering, Tokyo University of Science, Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, Japan
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Fukuda Yukio
Department of Electronic System Engineering, Faculty of System Engineering, Tokyo University of Science, Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, Japan
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Fukuda Yukio
Department of Electronic Systems Engineering, Faculty of Systems Engineering, Tokyo University of Science, Suwa, 5000-1 Toyohira, Chino, Nagano 391-0292, Japan
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Nishida Takashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Shiosaki Tadashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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