Effect of Interface Structure on Electrical Properties of (Ba,Sr)TiO3 Thin Films on Glazed Alumina Substrate
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概要
- 論文の詳細を見る
We examined the impact that the electrode/(Ba,Sr)TiO3 (BST) interface structures have on electric properties by investigating the electrical conduction mechanism of the BST thin-film capacitors with Pt and Au top electrodes. The BST thin films were prepared on the Pt bottom electrode/glazed Al2O3 substrate by chemical solution deposition (CSD). The dielectric property of the as-deposited Pt/BST/Pt capacitor had a large frequency dispersion and the leakage current properties deteriorated because the Pt top electrode/BST interface structure is rough. However, by post-annealing for 30 min at 400 °C after the top electrode was deposited, the frequency and temperature properties improved. The Schottky barrier height at the Pt top electrode/BST interface was 1.03 eV and that at the Au/BST interface was 0.73 eV, which indicated that its electrical conduction mechanism depends on the Schottky emission model. The dielectric constant, $\tan\delta$, and tunability of the Au/BST/Pt capacitor are 200, 0.0178, and 53.7% (at 214 kV/cm, 6.0 V), respectively, which showed excellent dielectric properties. This suggests that high-quality BST films for application to tunable microwave devices can be formed on a very inexpensive glazed Al2O3 substrate.
- 2008-09-25
著者
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NISHIDA Takashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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Shiosaki Tadashi
Graduate School Of Materials Science Nara Institute Of Science And Technology
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UCHIYAMA Kiyoshi
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
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Takeda Hiroaki
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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Echizen Masahiro
Graduate School of Electric and Electronic Engineering, Hachinohe Institute of Technology, 88-1 Oobiraki, Myo, Hachinohe, Aomori 031-8501, Japan
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Echizen Masahiro
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Nozaki Takashi
Yokohama Denshi Seiko Co., Ltd., 3005-2 Suzawa, Itoigawa, Niigata 949-0301, Japan
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Mizutani Yoji
Yokohama Denshi Seiko Co., Ltd., 3005-2 Suzawa, Itoigawa, Niigata 949-0301, Japan
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Gun Bhakdisongkhram
Yokohama Denshi Seiko Co., Ltd., 3005-2 Suzawa, Itoigawa, Niigata 949-0301, Japan
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Uchiyama Kiyoshi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Takeda Hiroaki
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Nozaka Takashi
Yokohama Denshi Seiko Co., Ltd., 3005-2 Suzawa, Itoigawa, Niigata 949-0301, Japan
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Nishida Takashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Shiosaki Tadashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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