Annealing and Composition Effects of (BaxSr1-x)Ta2O6 Thin Films Fabricated by Sol–Gel Method
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概要
- 論文の詳細を見る
The annealing atmosphere effects and composition effects on the electrical properties of five compositions of (BaxSr1-x)Ta2O6 thin films were investigated. O2 atmosphere annealing prevented the diffusion of Ti from the substrates into thin films and thus improved the dielectric properties of thin films. Thin films of all compositions show dielectric constants higher than 60 and loss tangents lower than 1%. Sr substituted for Ba in BaTa2O6 thin films showed a strong influence on the material properties. Among the samples, (Ba0.75Sr0.25)Ta2O6 thin film shows good bias stability, a high dielectric constant of about 65, low loss tangent of about 0.9% and low leakage current of about $10^{-7}$ A/cm2, and is regarded as the most promising for application in next-generation miniaturization.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2010-09-25
著者
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NISHIDA Takashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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UCHIYAMA Kiyoshi
Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST)
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Uraoka Yukiharu
Graduate School of Material Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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Uraoka Yukiharu
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Lu Li
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Echizen Masahiro
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Echizen Masahiro
Graduate School of Electric and Electronic Engineering, Hachinohe Institute of Technology, 88-1 Oobiraki, Myo, Hachinohe, Aomori 031-8501, Japan
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Uchiyama Kiyoshi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Nishida Takashi
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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