Effect of Nitrogen on Electrical and Physical Properties of Polyatomic Layer Chemical Vapor Deposition HfSixOy Gate Dielectrics
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概要
- 論文の詳細を見る
The effect of nitrogen incorporation on polyatomic layer chemical vapor deposition (PLCVD) hafnium silicate (HfSixOy) films was investigated. The physical and electrical properties of nitride hafnium silicate (HfSixOyNz) and HfSixOy dielectric films are reported. X-ray photoelectron spectroscopy (XPS) was used to check chemical compositions, nitrogen profile, band gap, and band offset of the HfSixOy and HfSixOyNz films. The nitrogen incorporation results in decreases in the band gap and band offset of the HfSixOy sample. The nitrogen profile obtained by secondary ion mass spectroscopy (SIMS) shows a gradient decrease from the surface to the interface. The prepared HfSixOy and HfSixOyNz films have reasonable electrical performance.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-11-15
著者
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Fuyuki Takashi
Graduate School Of Material Science Nara Institute Of Science And Technology
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NAKAMURA Hideki
Graduate School of Materials Science, Nara Institute of Science and Technology
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Horii Sadayoshi
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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Uraoka Yukiharu
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Punchaipetch Prakaipetch
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Okamoto Takeshi
Graduate School Of Medical Professions Kawasaki University Of Medical Welfare
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Uraoka Yukiharu
Graduate School of Material Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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Horii Sadayoshi
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc., 2-1 Yasuuchi, Yatsuo-Machi, Nei-gun, Toyama 939-2393, Japan
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Punchaipetch Prakaipetch
Graduate School of Materials Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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Okamoto Takeshi
Graduate School of Materials Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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Nakamura Hideki
Graduate School of Materials Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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