Improvement of SiO2/SiC Interface Properties by Nitrogen Radical Irradiation

元データ 出版 2003-06-01 Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyo

概要

Effects of nitrogen (N) radical irradiation on SiO2/4H- and 6H-SiC interface properties were investigated. N radicals were irradiated to dry thermal oxides on SiC. X-ray photoelectron spectroscopy measurements revealed that N atoms were introduced into the SiO2/SiC interface with 1 at%. To evaluate the interface state density, high and low frequency capacitance - voltage characteristics were measured using n-type metal-oxide-semiconductor (MOS) structures. The interface state density was reduced by irradiation of N radicals. Thin oxides were found to be effective in reducing the interface state density. The channel mobility of n-channel inversion-mode MOS field-effect transistors was improved. The N atom incorporation gives a favorable effect for the improvement of SiO2/SiC interface properties.

著者

Maeyama Yuusuke Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan
Yano Hiroshi Graduate School Of Materials Science Nara Institute Of Science And Technology
Furumoto Yoshihisa Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan
Hatayama Tomoaki Graduate School of Engineering, Kyoto Univercity
Uraoka Yukiharu Graduate School of Material Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
Fuyuki Takashi Graduate School Of Material Science Nara Institute Of Science And Technology

関連論文

Investigation of Near-Interface Traps Generated by NO Direct Oxidation in C-face 4H-SiC Metal-Oxide-Semiconductor Structures
Novel Stacked Nanodisk with Quantum Effect Fabricated by Defect-free Chlorine Neutral Beam Etching
A New Silicon Quantum-Well Structure with Controlled Diameter and Thickness Fabricated with Ferritin Iron Core Mask and Chlorine Neutral Beam Etching
Effect of High Magnetic Field on Copper Deposition from an Aqueous Solution
Electron Injection into Si Nanodot Fabricated by Side-Wall Plasma Enhanced Chemical Vapor Deposition
Gate Length Dependence of Hot Carrier Reliability in Low-Temperature Polycrystatline-Silicon P-Channel Thin Film Transistors
Low Temperature Nitridation of Si Oxide Utilizing Activated Nitrogen(Semiconductors)
Comprehensive Study on Reliability of Low-Temperature Poly-Si Thin-Film Transistors under Dynamic Complimentary Metal-Oxide Semiconductor Operations
Hot Carrier Effect in Low-Temperature poly-Si p-ch Thin-Film Transistors under Dynamic Stress : Semiconductors
Floating Gate MOS Capacitor with High-Density Nanodots Array Produced by Protein Supramolecule
High-Density Floating Nanodots Memory Produced by Cage-Shaped Protein
Fabrication of Defect-Free Sub-10nm Si Nanocolumn for Quantum Effect Devices Using Cl Neutral Beam Process
Carrier Injection/Transport Characteristics of Photochromic Diarylethene Film : Surfaces, Interfaces, and Films
Solution Electrochemiluminescent Cell with a High Luminance Using an Ion Conductive Assistant Dopant Optics and Quantum Electronics
Solution Electrochemiluminescent Cell Using Tris(phenylpyridine) Iridium : Optics and Quantum Electronics
Improving High-κ Gate Dielectric Properties by High-Pressure Water Vapor Annealing
Strain in GaP Films Heteroepitaxially Grown on Si by Metalorganic Chemical Vapor Deposition
Comparison between the photoluminescence Properties of LaPO_4 : Tb, Ce Phosphor under 254nm Excitation and those under 365nm Excitation
NH_3 Plasma Pretreatment of 4H-SiC(0001) Surface for Reduction of Interface States in Metal-Oxide-Semiconductor Devices
Determination of Minority-Carrier Lifetime in Multicrystalline Silicon Solar Cells using Current Transient Behaviors
Thickness Dependence of Electrical Properties for High-$k$ SrTa2O6 Thin Films Fabricated by Sol--Gel Method
Analysis of Device Performance by Quasi Three-Dimensional Simulation for Thin Film Polycrystalline Silicon Solar Cells with Columnar Structure : Semiconductors
Location and Density Control of Carbon Nanotubes Synthesized Using Ferritin Molecules
Three-Dimensional Nanodot-Type Floating Gate Memory Fabricated by Bio-Layer-by-Layer Method
Passivation Effect of Plasma Chemical Vapor Deposited SiNx on Single-Crystalline Silicon Thin-Film Solar Cells
Thermal Etching of 4H-SiC(0001) Si Faces in the Mixed Gas of Chlorine and Oxygen
Reliability of High-Frequency Operation of Low-Temperature Polysilicon Thin Film Transistors under Dynamic Stress
Reliability of Low-Temperature Poly-Si Thin Film Transistors with Lightly Doped Drain Structures
Rear Side Passivated Monocrystalline Silicon Thin Film Solar Cells with Laser Fired Contact Process
Low Temperature Nitridation of Si Oxide Utilizing Activated Oxygen and Nitrogen
Electrical Properties and Thermal Stability of Cu/6H-SiC Junctions : Electrical Properties of Condensed Matter
Three-Dimensional Nanodot-Type Floating Gate Memory Fabricated by Bio-Layer-by-Layer Method
Polycrystalline Silicon Thin Film for Solar Cells Utilizing Aluminum Induced Crystallization Method
Irradiation-Damages in Atmospheric Plasma Used in a Resist Ashing Process for Thin Film Transistors
High-Pressure Water Vapor Heat Treatment for Enhancement of SiOx or SiNx Passivation Layers of Silicon Solar Cells
Analysis of Photoelectrochemical Processes in $\alpha$-SiC Substrates with Atomically Flat Surfaces
Two-Dimensional Si-Nanodisk Array Fabricated Using Bio-Nano-Process and Neutral Beam Etching for Realistic Quantum Effect Devices
Selective Emitter Formation by Laser Doping for Phosphorous-Doped n-Type Silicon Solar Cells
Laser-Doping Technique Using Ultraviolet Laser for Shallow Doping in Crystalline Silicon Solar Cell Fabrication
Evaluation of Crystallinity in 4H–SiC{0001} Epilayers Thermally Etched by Chlorine and Oxygen System
Improved Electronic Properties of Laser-Doped Emitters by Reducing Surface Roughness
Spatially Resolved Electroluminescence Imaging of Shunt Sources in Crystalline Silicon Solar Cells
Shape Control of Trenched 4H-SiC C-Face by Thermal Chlorine Etching
Size Control of ZnS Nanoparticles by Electro-Spray Deposition Method
Floating Gate Memory Based on Ferritin Nanodots with High-$k$ Gate Dielectrics
Analysis of the Temperature Characteristics in Polycrystalline Si Solar Cells Using Modified Equivalent Circuit Model
Floating Gate Metal–Oxide–Semiconductor Capacitor Employing Array of High-Density Nanodots Produced by Protein Supramolecule
Floating Nanodot Gate Memory Devices Based on Biomineralized Inorganic Nanodot Array as a Storage Node
Degradation in Low-Temperature Poly-Si Thin Film Transistors Depending on Grain Boundaries
Evaluation of InGaP/InGaAs/Ge Triple-Junction Solar Cell under Concentrated Light by Simulation Program with Integrated Circuit Emphasis
Effect of SiO2 Tunnel Oxide Thickness on Electron Tunneling Mechanism in Si Nanocrystal Dots Floating-Gate Memories
Hot Carrier Effect in UltraThin Gate Oxide Metal Oxide Semiconductor Field Effect Transistor
Analysis of Hot Carrier Effect in Low-Temperature Poly-Si Gate-Overlapped Lightly Doped Drain Thin Film Transistors
Analysis of p–n Junction Profiles of Polycrystalline Silicon Thin-Film Solar Cells by Electron-Beam-Induced Current Technique
Hot Carrier Effects in Low-Temperature Polysilicon Thin-Film Transistors
Fabrication of Anodic Oxidation Films on 4H–SiC at Room Temperature Using HNO3-Based Electrolytes
Effect of Nitrogen on Electrical and Physical Properties of Polyatomic Layer Chemical Vapor Deposition HfSixOy Gate Dielectrics
Nucleation Control by Intermittent Supply of Dichlorosilane towards the Fabrication of Polycrystalline Silicon Thin Films with Large Grain Size
Low-Temperature Microcrystalline Silicon Film Deposited by High-Density and Low-Potential Plasma Technique Using Hydrogen Radicals
Dependence of Solar Cell Performance on Electronic Properties at Grain Boundaries in Polycrystalline Silicon Thin Films Deposited by Atmospheric Pressure Chemical Vapor Deposition
Effects of Dot Density and Dot Size on Charge Injection Characteristics in Nanodot Array Produced by Protein Supramolecules
Novel Method for Making Nanodot Arrays Using a Cage-like Protein
Annealing and Composition Effects of (BaxSr1-x)Ta2O6 Thin Films Fabricated by Sol–Gel Method
Precise Analysis of Surface Recombination Velocity in Crystalline Silicon Solar Cells Using Electroluminescence
Fabrication of Zinc Oxide Nanopatterns by Quick Gel-Nanoimprint Process toward Optical Switching Devices
Adsorption Density Control of Ferritin Molecules by Multistep Alternate Coating
Role of Hydrogen in Dry Etching of Silicon Carbide Using Inductively and Capacitively Coupled Plasma
Plasmon Absorbance of SiO
Electron Injection into Si Nanodot Fabricated by Side-Wall Plasma Enhanced Chemical Vapor Deposition
Low Temperature Nitridation of Si Oxide Utilizing Activated Oxygen and Nitrogen
▼もっと見る

検索論文

空間高調波で自励する巻線界磁形同期モータの数学モ..
深海底に世界一の火山を発見 (特集 日本をおそっ..
ニッポンの頭脳集団 : ハイテク研究組織の素顔(..
Android OS端末の情報漏えい通知における..
デバイスペアリングを利用した位置証明プロトコルの..

検索著者

秋山 幸生 東日本学園大学歯学部口腔外科学第1講..
秋山 幸生 東日本学園大学歯学部口腔外科学第2講..
吉川 信也 姫工大・理・生命科学
重松 昭生 産業医科大学麻酔学教室
ITOH Kimitaka National Institute..