Improving Crystallinity of Thin Si Film for Low-Energy-Loss Micro-/Nano-Electromechanical Systems Devices by Metal-Induced Lateral Crystallization Using Biomineralized Ni Nanoparticles (Special Issue : Applied Physics on Materials Research)
スポンサーリンク
概要
著者
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Yamashita Ichiro
Graduate School Of Materials Science Nara Institute Of Science And Technology
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KOJIMA Nobuaki
Department of Physical Electronics, Tokyo Institute of Technology
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Yamaguchi Masafumi
Department Of Physiological Chemistry Hiroshima University School Of Medicine
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OHSHITA Yoshio
Department of Engineering, Toyota Technological Institute
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Sasaki Minoru
Department Of Acoustic Design Kyushu Institute Of Design
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Uraoka Yukiharu
Graduate School of Material Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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Kumagai Shinya
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1, Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Murase Hiromu
Department of Advanced Science and Technology, Toyota Technological Institute, Nagoya 468-8511, Japan
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Miyachi Syusuke
Department of Advanced Science and Technology, Toyota Technological Institute, Nagoya 468-8511, Japan
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