Direct Fabrication of Uniform and High Density Sub-10-nm Etching Mask Using Ferritin Molecules on Si and GaAs Surface for Actual Quantum-Dot Superlattice
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概要
- 論文の詳細を見る
Direct formation of a uniform, closely packed, and high-density two-dimensional array of ferritin molecules was successfully achieved on Si and GaAs substrates by modifying the surface using neutral beam oxidation, whereas the same protocol produced a low density and disorded array on thermal silicon oxide. The surfaces of neutral-beam-oxidized SiO2 and GaAs and thermal silicon oxide were characterized, and the mechanism of ferritin array formation was investigated. The experimental results strongly suggested that the surface hydrophilicity realized by the neutral beam oxidation is essential for the formation of an ordered and high-density two-dimensional array of ferritin molecules.
- 2011-01-25
著者
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Yamashita Ichiro
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Samukawa Seiji
Institute Of Fluid Science Tohoku University
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Igarashi Makoto
Institute Of Fluid Science Tohoku University
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Huang Chi-hsien
Institute Of Fluid Science Tohoku University
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Igarashi Makoto
Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan
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Yamashita Ichiro
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0101, Japan
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Tsukamoto Rikako
Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan
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