Plasma-Induced Deterioration of Mechanical Characteristics of Microcantilever
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概要
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We investigated the effects of the defects generated by plasma in a silicon (Si) microcantilever. The E$'$ center density of the microcantilever was markedly increased after argon (Ar) plasma irradiation. On the other hand, the E$'$ center density could be effectively suppressed when using Ar neutral beam (NB). The mechanical characteristics, including the $Q$ factor and resonant frequency, of a microcantilever were markedly decreased by plasma irradiation, which revealed that plasma irradiation deteriorated the mechanical characteristics of the micro element. These results have a considerable impact on micro- and nano-electro-mechanical systems (MEMSs/NEMSs). On the other hand, for NB irradiation, both characteristics were basically unchanged after irradiation, which indicates that the NB process is an ultralow-damage process. Therefore, the NB process may have tremendous potential to play an important role in the micro- and nano-fabrication processes.
- 2010-04-25
著者
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Huang Chi-hsien
Institute Of Fluid Science Tohoku University
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Yoshida Yusuke
Graduate School Of Engineering Tohoku University
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Seiji Samukawa
Institute of Fluid Science, Tohoku University, 2-1-1 Katahiara, Aoba-ku, Sendai 980-8577, Japan
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Yusuke Yoshida
Graduate School of Engineering, Tohoku University, 6-6 Aramakiaza, Aoba-ku, Sendai 980-8579, Japan
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Takahito Ono
Graduate School of Engineering, Tohoku University, 6-6 Aramakiaza, Aoba-ku, Sendai 980-8579, Japan
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Satoshi Yamasaki
Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Tomura Maju
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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