Optical Diagnostics of a Pulsed Inductively Coupled Nitrogen Plasma

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概要

• 論文の詳細を見る

• Temporal variation of electron energy distribution through a pulsed inductively coupled nitrogen plasma is discussed by the temporally resolved measurements of optical emission spectroscopy and laser-induced fluorescence. The intense intensity peak of the first negative band emission (N2+) immediately after RF power application to the plasma is likely to be caused by the rapid increase and subsequent decrease in a ≈3-eV electron population because the electron impact excitation of ground state N2+ ions is assumed to cause the first negative band emission. The intensity peak for the second positive band emission (N2), the threshold energy of which is ≈11 eV, is also observed but even smaller than the first negative band emission, indicating the smaller enhancement of an electron population at ≈11 eV than that at ≈3 eV during electron heating after the RF power application.

• 社団法人 電気学会の論文
• 2005-01-01

著者

• SAMUKAWA Seiji

  Institute of Fluid Science, Tohoku University

• Samukawa Seiji

  Institute Of Fluid Science Tohoku University

• KITAJIMA Takeshi

  Department of Electrical Engineering, Faculty of Science and Technology, Keio University

• Kitajima Takeshi

  Department Of Electrical And Electronic Engineering National Defense Academy

• NAKANO Toshiki

  Department of Electrical and Electronic Engineering, National Defense Academy

• TAKAIRA Seiichi

  Department of Electrical and Electronic Engineering, National Defense Academy

• Nakano Toshiki

  Department Of Electrical And Electronic Engineering National Defense Academy

• Takaira Seiichi

  Department Of Electrical And Electronic Engineering National Defense Academy

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