Novel Si Nanodisk Fabricated by Biotemplate and Defect-Free Neutral Beam Etching for Solar Cell Application

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概要

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• We have already developed a uniform silicon-based two-dimensional quantum dot superlattice (2D QDSL) (i.e., 2D array of Si nanodisks) on the $x$–$y$ plane with high-density nanodisks (NDs) and controllable size and spacing between NDs. To integrate more nanodisks in the third dimension ($z$-axis), a new stacked nanodisk (S-ND) has been developed by using thin film deposition, bio-template and advanced alternate etching. The S-ND structure comprises of two NDs connected vertically by coupling a tunnel junction (TJ). The scanning transmission electron microscopy image clearly revealed the stacked structure. The quantum confinement of S-ND was confirmed by observing the Coulomb staircase at room temperature. Tunneling current could be controlled by changing TJ thickness. By simply changing the ND thickness, band gap energy ($E_{\text{g}}$) could be controlled. These characteristics of the quantum effect and $E_{\text{g}}$ play important roles in QDSL solar cells.

• 2010-04-25

著者

• Horita Susumu

  School Of Materials Science Japan Advanced Institute Of Science And Technology

• Igarashi Makoto

  Institute Of Fluid Science Tohoku University

• Huang Chi-hsien

  Institute Of Fluid Science Tohoku University

• Seiji Samukawa

  Institute of Fluid Science, Tohoku University, 2-1-1 Katahiara, Aoba-ku, Sendai 980-8577, Japan

• Takashi Fuyuki

  Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Yukiharu Uraoka

  Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Masaki Takeguchi

  High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan

• Makoto Igarashi

  Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

• Ichiro Yamashita

  Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Susumu Horita

  School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan

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