Increase of Dielectric Constant of an Epitaxial (100) Yttria-Stabilized Zirconia Film on (100) Si Substrate Deposited by Reactive Sputtering in the Metallic Mode : Surfaces, Interfaces, and Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-11-15

著者

• 堀田 将

  北陸先端科学技術大学院大学材料科学研究科

• Horita Susumu

  School Of Materials Science Japan Advanced Institute Of Science And Technology

• KUNIYA Takuji

  School of Materials Science, Japan Advanced Institute of Science and Technology

• Kuniya T

  School Of Materials Science Japan Advanced Institute Of Science And Technology

• Kuniya Takuji

  School Of Material Science Japan Advanced Institute Of Science And Technology

• Hayashi Shigenori

  Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.

• 堀井 將

  北陸先端科学技術大学院大学 材料科学研究科

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