Low Temperature Heteroepitaxial Growth of a New Phase Lead Zirconate Titanate Film on Si Substrate with an Epitaxial(ZrO_2)_<1-x>(Y_2O_3)_x Buffer Layer
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-08-15
著者
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堀田 将
北陸先端科学技術大学院大学材料科学研究科
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Horita Susumu
School Of Materials Science Japan Advanced Institute Of Science And Technology
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AIKAWA Mami
School of Materials Science, Japan Advanced Institute of Science and Technology
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NARUSE Tetsuya
School of Materials Science, Japan Advanced Institute of Science and Technology
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Hayashi Shigenori
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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堀井 將
北陸先端科学技術大学院大学 材料科学研究科
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Aikawa Mami
School Of Materials Science Japan Advanced Institute Of Science And Technology
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Naruse Tetsuya
School Of Materials Science Japan Advanced Institute Of Science And Technology
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