Enhancement of Crystallization of an Si Film on a Quartz Substrate by Thermal Electron Irradiation : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-12-01
著者
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Horita Susumu
School Of Materials Science Japan Advanced Institute Of Science And Technology
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Horita Susumu
School Of Materials Science Japan Advanced Institute Of Science And Technology Hokuriku
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MIYOSHI Seiji
School of Materials Science, Japan Advanced Institute of Science and Technology, Hokuriku
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Miyoshi Seiji
School Of Materials Science Japan Advanced Institute Of Science And Technology Hokuriku
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