Evaluation of Multilayer Structure and Depth Profile by PAS Using a Transparent Transducer : Photoacoustic Spectroscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1989-06-20

著者

• Adachi Seiji

  Central Research Laboratory Matsushita Electric Industrial Co. Ltd.

• Adachi Seiji

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Adachi S

  Department Of Electronic Engineering Faculty Of Engineering Gunma University

• Adachi Sadao

  Department Of Electronic Engineering Gunma University

• 堀田 将

  北陸先端科学技術大学院大学材料科学研究科

• Horita Susumu

  Faculty Of Technology Kanazawa University

• Adachi S

  Gunma Univ. Gunma Jpn

• Adachi S

  Hiroshima Univ. Higashihiroshima Jpn

• HATA Tomonobu

  Faculty of Technology, Kanazawa University

• Adachi Satoru

  Institute Of Laser Engineering Osaka University:(present Address)department Of Material Science Hime

• Hata Toshio

  Electrotechnical Laboratory:tokai University

• ADACHI Sakae

  Faculty of Technology, Kanazawa University

• Hayashi Shigenori

  Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.

• Hata T

  Kanazawa Univ. Kanazawa Jpn

• Hata Tomonobu

  Faculty Of Engineering Kanazawa University

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