Optical Constants of 6H-SiC Single Crystals
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概要
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The complex dielectric functions of 6H-SiC for light polarized perpendicular and parallel to the optic axis c were measured using spectroscopic ellipsometry. The measurements were made on the (0001) and (0110) surfaces of 6H-SiC in the photon energy range between 1.2 and 5.4 eV at room temperature. The measured dielectric-function spectra were fitted with a classical Lorentz-type oscillator model. The indices of refraction in the transparent region (F<4,5 eV) were also analyzed using the first-order Sellmeier equation. From this analysis, we obtained the high-frequency dielectric constants ε∞ of 6H-SiC as 6.59 for E⊥c and 6.67 for E⫽c. Using the Lyddane-Sachs-Teller relation, we also obtained the static dielectric constants ε_s as 9.76 for E⊥c and 9.98 for E⫽c.
- 社団法人応用物理学会の論文
- 1994-05-15
著者
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Adachi Sadao
Department Of Electronic Engineering Gunma University
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NINOMIYA Susumu
Department of Electronic Engineering, Faculty of Engineering, Gunma University
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