Optical Properties of Ion-Implanted Si layeres Studied by Spectroscopic Ellipsometry
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-04-15
著者
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MATSUMURA Takashi
Department of Mechanical Engineering; Tokyo Denki University
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Adachi Sadao
Department Of Electronics Osaka University
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Adachi Sadao
Department Of Electronic Engineering Gunma University
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Suzuki Takahiro
Department Of Chemical Engineering Science Yokohama National University
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Matsumura Takashi
Department Of Mechanical Engineering & Intelligent Systems University Of Electro-communications
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Matsumura T
Department Of Electronic Engineering Faculty Of Engineering Gunma University
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Suzuki Takahiro
Department Of Anesthesiology Surugadai Nihon University Hospital
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Matsumura Takashi
Department Of Electronic Engineering Faculty Of Engineering Gunma University
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