Evaluation of Ion Implantation into Silicon Photoacoustic Spectroscopy using Transparent Transducer Method : Photoacoustic Spectroscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1988-06-20

著者

• Adachi Seiji

  Central Research Laboratory Matsushita Electric Industrial Co. Ltd.

• Adachi Seiji

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Adachi S

  Department Of Electronic Engineering Faculty Of Engineering Gunma University

• Adachi Sadao

  Department Of Electronic Engineering Gunma University

• 堀田 将

  北陸先端科学技術大学院大学材料科学研究科

• Horita Susumu

  Faculty Of Technology Kanazawa University

• Adachi S

  Gunma Univ. Gunma Jpn

• Adachi S

  Hiroshima Univ. Higashihiroshima Jpn

• HATA Tomonobu

  Faculty of Technology, Kanazawa University

• Adachi Satoru

  Institute Of Laser Engineering Osaka University:(present Address)department Of Material Science Hime

• Hata Toshio

  Electrotechnical Laboratory:tokai University

• ADACHI Sakae

  Faculty of Technology, Kanazawa University

• Hayashi Shigenori

  Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.

• Hata T

  Kanazawa Univ. Kanazawa Jpn

• Hata Tomonobu

  Faculty Of Engineering Kanazawa University

• Yago Ken'ichi

  Faculty Of Technology Kanazawa University

関連論文

• Fabrication of Multilayer Structures and Ramp-Edge Josephson Junctions with (Hg,Re)Ba_2CaCu_2O_y Films
• (Hg, Re)Ba_2CaCu_2O_y [100]-Tilt Grain Boundary Josephson Junctions with High Characteristic Voltages
• Noise Properties of (Hg_Re_)Ba_2CaCu_2O_y Dc Superconducting Quantum Interference Device on (LaAlO_3)_-(SrAl_Ta_O_3)_ Substrates : Superconductors
• 直線偏光Nd:YAGレーザーによる規則性配列微細Siドットの形成(半導体Si及び関連材料・評価)
• Periodic Grain-Boundary Formation in a Poly-Si Thin Film Crystallized by Linearly Polarized Nd: YAG Pulse Laser with an Oblique Incident Angle
• Analysis on Operation of a F-FET Memory With an Intermediate Electrode
• Mesoscopic Phenomena in Microstructures of IV-VI Epilayers
• Direct Observation of Exciton Magnetic Polaron in CdMnTe from Polarized Magneto-Photoluminescence
• Fabrication and Anisotropic Transport Properties of (Hg, Re) Ba_2CaCu_2O_y Epitaxial Thin Films on Vicinal Substrates with Buffer Layers
• A New Homologous Series of Superconducting Cuprates with the 22(n-1)n Structure, (Hg_Tl_x)_2Ba_2Ca_Cu_nO_y (x〜0.4, n=3, 4)
• New Magnetic Phases in the R-Cu-O (R=Tm and Y) Systems
• A Missing Link is Found: a Novel Homologous Series of Superconducting Pb-Based Cuprates
• Advances in High-T_c Single Flux Quantum Device Technologies
• Design and Operation of HTS SFQ Circuit Elements(Innovative Superconducting Devices and Their Applications)
• Development of SFQ Sampler Using High-T_c Superconductor
• Development of Thin Film Multilayer Structures with Smooth Surfaces for HTS SFQ Circuits(Digital Applications, Superconducting Electronic Devices and Their Applications)
• Fabrication of La-Doped YBCO and SrTiO_3-Buffered LSAT Thin Films for Ramp-Edge Josephson Junctions on Superconducting Ground Plane(Recent Progress in Oxide Thin Films by Sputtering)
• Development of Two-Step Deposition Process for Interface-Modified Ramp-Edge Josephson Junction with Low Sheet Inductance and Small Spread : Superconductors
• Influence of Counter-Layer Deposition Condition on Critical Current Spread in Interface-Modified Ramp-Edge Junction Arrays : Superconductors
• Optical Properties of CuO Studied by Spectroscopic Ellipsometry
• Optical Properties of Cu_2O Studied by Spectroscopic Ellipsometry
• Numerical Studies on Parameters for Stable Adiabatic Inversion by Gaussian and Square Pulses
• Measurement of Dipole Matrix Element of Atomic Gd Transitions using Rabi Flopping
• Superlattice Structure of TlBa_2Ca_2Cu_3O_y and Tl_2Ba_2Ca_2Cu_3O_y (c/2)
• Synthesis and Characterization of Single-Phase (Tl_Bi_x)Sr_2Ca_2Cu_3O_y Ceramics
• Superconductivity in a Tl-Sr-Y-Cu-O System
• Superconductive Transition at 120 K in a Tl-Bi-Sr-Ca-Cu-O System
• Superconductivity Near 50 K in a Bi-La-Ca-Cu-O System
• Superconductivity in a Tl-Pb-Pr-Sr-Cu-O System
• Synthesis of Bi-Sr-Ca-Cu-O Ceramics with Large Intergrowth Defects
• Superconductivity in a Ln-Pb-Sr-Ca-Cu-O System
• Formation and Decomposition of Superconducting BiSrCaCu_2O_x Ceramics : Electrical Properties of Condensed Matter
• Superconducting Properties in a Bi-Sr-Ca-Cu-O System : Electrical Properties of Condensed Matter
• Annealing Effect of High-T_c Superconducting Y(Ba_Sr_x)_2Cu_3O_ Ceramics
• Chemical Treatmemt Effect of Si(111) Surfaces in H_2SO_4 : H_2O_2 Solution
• NH_4OH-Treated Si(111) Surfaces Studied by Spectroscopic Ellipsometry and Atomic Force Microscopy
• Quasi-Static Analysis of Resonant Brillouin Scattering in ZnSe, ZnTe and CdS
• Surface Morphology of Tl_2Ba_2Ca_2Cu_O_y Thin Films Prepared by Thallium Diffusion Process
• Substitution Effect of Rare Earth Elements for Y in Pb-Sr-Y-Ca-Cu-O with "1212" Structure
• Study on Annealing Treatment and Sr/Ca Ratio for Pb-Sr-Y-Ca-Cu-O Ceramics with "1212" Structure
• In Situ Preparation of Pb-Based Superconducting Thin Films at Low Temperature and Low Oxidizing Atmosphere
• Annealing Effect of (Pb/Cu)SrLaCuO_y Superconductor
• Crystal Structure of (Pb/Cu)SrLaCuO_y Superconductor
• Superconductivity in "1201" Lead Cuprate
• Evaluation of Multilayer Structure and Depth Profile by PAS Using a Transparent Transducer : Photoacoustic Spectroscopy
• Evaluation of Ion Implantation into Silicon Photoacoustic Spectroscopy using Transparent Transducer Method : Photoacoustic Spectroscopy
• Decomposition of Chlorofluorocarbon by Pulse High-Current Discharge and Fast Burning through Spark Discharge
• Decomposition of Low-Pressure Pollutant by Repeated Pulse Microwave Discharge
• Characterization of La-doped YBCO superconducting films deposited by DC magnetron sputtering at various off-axis geometries
• Properties of (Hg_Re_)Ba_2CaCu_2Oy Grain Boundary Junctions on SrTiO_3 and (LaAlO_3)_-(SrAl_Ta_O_3)_ Substrates with Different Misorientation Angles
• The Effect of Zn-Doping on the Magnetic Field Induced Dimensional Crossover in YBa_2Cu_4O_8 : Condensed Matter: Electronic Properties, etc.
• Application of Pulse High-Energy Electron Beams for Decomposition of Chlorofluorocarbon in Atmospheric-Pressure Air
• Optical Constants of ZnSe_xTe_ Ternary Alloys
• Substitution Effect of Sr for Ba of High-T_c Superconducting YBa_2Cu_3O^ Ceramics
• Optical Properties of Ion-Implanted Si layeres Studied by Spectroscopic Ellipsometry
• Numerical Study on Acoustic Emission from Flow Past an Airfoil
• Spectroscopic Ellipsometry Study of (111) and (100)Si Surfaces Etched in Aqueous KOH Solution
• Signal Processing and Sonification of Seismic Electromagnetic Radiation in the ELF Band(Special Section on Acoustic Signal Processing)
• Chemical Treatment Effectson Si (111) Surfaces in Aqueous NaF Solution : Semiconductors
• Effect of Lifetime Broadening on Resonant Brillouin Scattering in ZnTe and ZnSe
• Resonant Brillouin Scattering by LA Phonons in CdS
• Optical Constants of Amorphous Ga_2Te_3 and In_2Te_3
• On Signal Processing for Electromagnetic Waves Radiation Application to Great Earthquake Prediction
• Electroreflectance Study of (AlxGa1-x)0.5In0.5P Alloys
• HF-Treated (111), (110) and (100)Si Surfaces Studied by Spectroscopic Ellipsometry
• Spectroscopic Ellipsometry Study of Si Surfaces Modified by Low-Energy Ar^+-Ion Irradiation
• Refractive-Index Dispersion in Zn_Cd_xTe Ternary Alloys
• Optical Constants of Zn_Cd_xTe Ternary Alloys : Experiment and Modeling
• Optical Constants of Cubic ZnS
• Optical Constants of Amorphous Ga_2Se_3
• Optical Properties of SnTe
• Optical Properties of PbTe
• Chemical Etching Characteristics of (100)GaAs in Kusatsu Spa Water
• Numerical Derivative Analysis of the Pseudodielectric Function of CdTe
• Resonant Forbidden Brillouin Scattering in CdS
• Spectroscopic-Ellipsometry and Thermoreflectance Spectra of Sputter-Deposited InSb Films
• Optical Properties of (Al_xGa_)_In_P Quaternary Alloys
• Chemical Treatment Effects on Si Surfaces in SC2 Solutions Studied by Spectroscopic Ellipsometry
• Study of GaAs(001) Surfaces Treated in Aqueous HCl Solutions
• Porous Silicon Formation by Photoetching in HF/H2O2 Solution Using Incoherent Light Source
• Light Emission from Porous Silicon Photoetched in Aqueous Alkali Salt Solutions
• Analysis of Optical Constants for Sputter-Deposited InSb Films Based on the Interband-Transition Model
• Resonant Brillouin Scattering in Zn_xCd_Te Solid Solutions
• Resonant Brillouin Scattering in CdS by Piezoelectrically Inactive TA Phonon Domains
• Resonant Brillouin Scattering in ZnTe
• Resonant Brillouin Scattering in GaSe and GaS
• Recent Developments of High-T_c Electronic Devices with Multilayer Structures and Ramp-Edge Josephson Junctions
• High-Yield Fabrication Method for High-T_c Superconducting Quantum Interference Device Magnetometer with Integrated Multiturn Input Coil
• Optical Constants of In_Ga_xSb Ternary Alloys : Experiment and Modeling
• Photoreflectance Spectroscopy of ZnO for Ordinary and Extraordinary Rays
• Annealing Effect on Copper Impurity Emission in ZnSe
• Phosphorus-Ion-Implantation into ZnSe Single Crystals
• Chemical Treatment Effects of Si Surfaces in NH_4OH:H_2O_2:H_2O Solutions Studied by Spectroscopic Ellipsometry
• Optical Dispersion Relations in Amorphous Semiconductors: Model-Dielectric-Function Approach to Amorphous GaAs
• Energy Level Study of Phosphorus-Ion-Implanted ZnSe
• Optical Constants of ZnO
• Chemical Treatment Effect of Si(111) Surfaces in NH_4F Solution Studied by Spectroscopic Ellipsometry
• Chemical Etching of Thermally-Grown SiO_2 Films on SiC Studied by Spectroscopic Ellipsometry
• Optical Constants of 6H-SiC Single Crystals
• Anomalous Enhancement of Electron Paramagnetic Resonance Signal of Mn^ in N-Ion-Implanted CdS

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