Novel atmospheric pressure inductively coupled micro plasma source using floating wire electrode (Special issue: Plasma processing)
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Matsuyama Hiroki
Department Of Anesthesiology And Intensive Care Kyoto Prefectural University Of Medicine
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Yokoyama Yoshihiro
Department Of Advanced Energy Engineering Science Interdisciplinary Graduate School Of Engineering S
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Sasaki Minoru
Department Of Acoustic Design Kyushu Institute Of Design
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Kumagai Shinya
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1, Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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