Measurements of the CF, CF_2 and CF_3 Radicals in a CHF_3 Electron Cyclotron Resonance Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-05-01

著者

• Takahashi K

  National Inst. Res. In Inorganic Materials Ibaraki Jpn

• Hori Masaru

  Department Of Quantum Engineering Nagoya University

• GOTO Toshio

  Department of Quantum Engineering, Nagoya University

• Hori Masaru

  Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ

• Miyata K

  Kobe Steel Ltd. Kobe Jpn

• Takahashi K

  Department Of Physical Electronics Tokyo Institute Of Tecnology

• KISHIMOTO Shigeru

  Department of Quantum Engineering, Nagoya University

• Takahashi K

  Tokyo Inst. Technol. Yokohama Jpn

• Kishimoto Shigeru

  Department Of Quantum Engineering School Of Engineering Nagoya University

• Kishimoto Shigeru

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• Takahashi Kuniharu

  Graduate School Of Science And Technology Niigata University

• Takahashi Kouchiro

  National Institute For Research In Inorganic Materials

• TAKAHASHI Kunimasa

  Department of Quantum Engineering, School of Engineering, Nagoya Univeristy

• MARUYAMA Koji

  Department of Quantum Engineering, Nagoya University

• Goto Toshio

  Department Of Electronics Faculty Of Engineering Nagoya University

• Miyata Koji

  Department Of Quantum Engineering School Of Engineering Nagoya University

• Maruyama Koji

  Department Of Aerospace Engineering Osaka Prefecture University

• Goto Toshio

  Department Of Electronic Mechanical Engineering Nagoya University

• TAKAHASHI Kenji

  Semiconductor Research Laboratory, Pioneer Electronic Corporation

• GOTO Toshio

  Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University

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