TAKAHASHI Kunimasa | Department of Quantum Engineering, School of Engineering, Nagoya Univeristy
スポンサーリンク
概要
関連著者
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Takahashi K
National Inst. Res. In Inorganic Materials Ibaraki Jpn
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Hori Masaru
Department Of Quantum Engineering Nagoya University
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Takahashi K
Department Of Physical Electronics Tokyo Institute Of Tecnology
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Takahashi K
Tokyo Inst. Technol. Yokohama Jpn
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Takahashi Kuniharu
Graduate School Of Science And Technology Niigata University
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Takahashi Kouchiro
National Institute For Research In Inorganic Materials
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TAKAHASHI Kunimasa
Department of Quantum Engineering, School of Engineering, Nagoya Univeristy
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
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TAKAHASHI Kenji
Semiconductor Research Laboratory, Pioneer Electronic Corporation
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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KISHIMOTO Shigeru
Department of Quantum Engineering, Nagoya University
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Kishimoto Shigeru
Department Of Quantum Engineering School Of Engineering Nagoya University
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Kishimoto Shigeru
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Takahashi K
Department Of Physical Electronics Tokyo Institute Of Technology
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TAKAHASHI Kaoru
Department of Applied Physics, Tokyo University of Agriculture and Technology
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Miyata K
Kobe Steel Ltd. Kobe Jpn
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Takahashi Kensuke
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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Takahashi Kazuhiko
National Research Institute For Metals Tsukuba Laboratories:sanyo Elect. Co. Ltd.
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Takahashi Kasuke
National Laboratory For High Energy Physics
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後藤 俊夫
Imram Tohoku University
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Takahashi Katsuaki
Department Of Applied Chemistry Okayama University
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Miyata Koji
Department Of Quantum Engineering School Of Engineering Nagoya University
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Ikeda Makoto
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Ikeda M
Sony Corporation Research Center
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Maruyama Kenji
Telecommunications Advncement Organization Of Japan Sendai Research Center:graduate School Of Materi
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INAYOSHI Muneto
Department of Quantum Engineering, School of Engineering, Nagoya University
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Ikeda M
Tdk Electronic Device Business Group Akita Jpn
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MIYATA Koji
Department of Orthopaedic Surgery, Hokkaido University School of Medicine
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Inayoshi Muneto
Department Of Quantum Engineering School Of Engineering Nagoya Univeristy
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Ito M
Wakayama Univ. Wakayama Jpn
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Ikeda M
Toshiba Corp. Kawasaki Jpn
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MARUYAMA Koji
Department of Quantum Engineering, Nagoya University
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Miyata Koji
Department Of Orthopaedic Surgery Hokkaido University School Of Medicine
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Maruyama Koji
Department Of Aerospace Engineering Osaka Prefecture University
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Inayoshi Muneto
Department of Electrical Engineering, Hiroshima University
著作論文
- Evaluation of CF_2 Radical as a Precursor for Fluorocarbon Film Formation in Highly Selective SiO_2 Etching Process Using Radical Injection Technique
- CF_X (X=1-3) Radical Measurements in ECR Etching Plasma Employing C_4F_8 Gas by Infrared Diode Laser Absorption Spectroscopy
- Characteristics of Fluorocarbon Radicals and CHF_3 Molecule in CHF_3 Electron Cyclotron Resonance Downstream Plasma
- CF_X(X=1-3) Radicals Controlled by On-Off Modulated Electron Cyclotron Resonance Plasma and Their Effects on Polymer Film Deposition ( Plasma Processing)
- Measurements of the CF, CF_2 and CF_3 Radicals in a CHF_3 Electron Cyclotron Resonance Plasma
- Control of Fluorocarbon Radicals by On-Off Modulated Electron Cyclotron Resonance Plasma