Characteristics of Fluorocarbon Radicals and CHF_3 Molecule in CHF_3 Electron Cyclotron Resonance Downstream Plasma
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-08-15
著者
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Takahashi K
National Inst. Res. In Inorganic Materials Ibaraki Jpn
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Hori Masaru
Department Of Quantum Engineering Nagoya University
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Takahashi K
Department Of Physical Electronics Tokyo Institute Of Tecnology
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Takahashi K
Tokyo Inst. Technol. Yokohama Jpn
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Takahashi Kuniharu
Graduate School Of Science And Technology Niigata University
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Takahashi Kouchiro
National Institute For Research In Inorganic Materials
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TAKAHASHI Kunimasa
Department of Quantum Engineering, School of Engineering, Nagoya Univeristy
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
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TAKAHASHI Kenji
Semiconductor Research Laboratory, Pioneer Electronic Corporation
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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