Effects of Dilution Gases on Si Atoms and SiHx^^+ (X = 0-3) Ions in Electron Cyclotron Resonance SiH_4 Plasmas

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-07-01

著者

• ITO Masafumi

  Department of Pathology, Japanese Red Cross Nagoya Daiichi Hospital

• Hori Masaru

  Department Of Quantum Engineering Nagoya University

• Yamamoto Yasuo

  Department Of Chemistry College Of Science Rikkyo University

• GOTO Toshio

  Department of Quantum Engineering, Nagoya University

• Yamamoto Y

  College Of Engineering Hosei University

• Goto Takaaki

  Department Of Electric Engineering Tokyo University Of Agriculture And Technology

• Yamamoto Yuichi

  Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul

• Samukawa Seiji

  Vlsi Development Div. Nec Corporation

• Yamamoto Y

  Nippon Steel Corp. Kawasaki Jpn

• Hori Masaru

  Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ

• Yamamoto Y

  Nara Inst. Sci. And Technol. Nara Jpn

• Yamamoto Yoshitugu

  Department Of Chemistry For Materials Faculty Of Engineering Mie University

• Ito Masafumi

  Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi

• SUGANUMA Shinji

  Department of Electronics, Faculty of Engineering, Nagoya University

• Goto Toshio

  Department Of Electronics Faculty Of Engineering Nagoya University

• Suganuma Shinji

  Department Of Quantum Engineering School Of Engineering Nagoya University

• Goto Toshio

  Department Of Electronic Mechanical Engineering Nagoya University

• Yamamoto Y

  Material Science Japan Advanced Institute Of Science And Technology

• GOTO Toshio

  Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University

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