Low-Coherence Interferometry-Based Non-Contact Temperature Monitoring of a Silicon Water and Chamber Parts during Plasma Etching
スポンサーリンク
概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2010-05-25
著者
-
ITO Masafumi
Department of Pathology, Japanese Red Cross Nagoya Daiichi Hospital
-
OHTA Takayuki
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
-
Ohta Takayuki
Department Of Electronic Engineering Faculty Of Engineering Osaka University
-
Ohta Takayuki
Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
-
Ito Masafumi
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
-
KOSHIMIZU Chishio
Yamanashi Technology Development Center, Tokyo Electron AT Ltd.
-
MATSUDO Tatsuo
ES Core Technology Development Department, Tokyo Electron AT Ltd.
-
TUCHITANI Shigeki
Department of Opto-Mechatronics, Faculty of Systems Engineering, Wakayama University
-
Matsudo Tatsuo
Es Core Technology Development Department Tokyo Electron At Ltd.
-
Koshimizu Chishio
Yamanashi Technology Development Center Tokyo Electron At Ltd.
-
Tuchitani Shigeki
Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
-
Ohta Takayuki
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo University
-
Ohta Takayuki
Department of Chemistry, Graduate School of Science, The University of Tokyo
関連論文
- Fluorescent In Situ Hybridization 1p/19q Deletion/Imbalance Analysis of Low-Grade and Atypical Meningiomas
- Moyamoya Disease Associated With Pulmonary Sarcoidosis : Case Report
- Sustained Remission after Rituximab-containing Chemotherapy for Intravascular Large B-cell Lymphoma
- Wilms' tumor 1 message and protein expression in bone marrow failure syndrome and acute leukemia
- Epigenetic Regulation of CD20 Protein Expression in a Novel B-Cell Lymphoma Cell Line, RRBL1, Established from a Patient Treated Repeatedly with Rituximab-Containing Chemotherapy
- Successful Treatment with Imatinib Mesylate of a CML Patient in Megakaryoblastic Crisis with Severe Fibrosis
- High Titer of ADAMTS13 Inhibitor Associated with Thrombotic Microangiopathy of the Gut and Skeletal Muscle after Allogeneic Hematopoietic Stem Cell Transplantation
- In vivo Effects of a Histone Deacetylase Inhibitor, FK228, on Human Acute Promyelocytic Leukemia in NOD/Shi-scid/scid Mice
- Primary Angiitis of the Central Nervous System Mimicking Tumor-Like Lesion : —Case Report—
- Neutron Scattering Studies of Pyrochlore Compound Nd_2Mo_2O_7 in Magnetic Field
- Static Correlation and Dynamical Properties of Tb^-moments in Tb_2Ti_2O_7 : Neutron Scattering Study
- Neutron Scattering Study of the Spin Correlation in the Spin Ice System Ho_2Ti_2O_7
- Detailed Structure of the Magnetic Excitation Spectra of YBa_2Cu_3O_y and Its Implication on the Physical Characteristics of the Electron System
- On the Electronic and Magnetic Excitation Spectra of High-T_c Cu Oxides in the Normal and Superconducting States : Condensed Matter: Electronic Properties, etc.
- Magnetic Structure of Nd_2Mo_2O_7 : Condensed Matter: Electronic Properties, etc.
- Neutron Diffraction Study of Pyrochlore Compound R_2Ru_2O_7 (R=Y, Nd) above and below the Spin Freezing Temperature : Condensed Matter: Electronic Properties, etc.
- Study on the Absolute Density and Translational Temperature of Si Atoms in Very High Frequency Capacitively Coupled SiH_4 Plasma with Ar, N_2, and H_2 Dilution Gases
- Effects of Ar Dilution and Exciting Frequency on Absolute Density and Translational Temperature of Si Atom in Very High Frequency-Capacitively Coupled SiH_4 Plasmas
- Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF_4 Plasmas
- Selective hyperthermia using magnetoliposomes to target cervical lymph node metastasis in a rabbit tongue tumor model
- On the Magnetic Excitation Spectra of High-T_c Cu Oxides at Energies Up to the Region Far above the Resonance Energy(Condensed Matter: Electronic Structure, Electrical, Magnetic and Optical Properties)
- Insulinoma with Suvsequent Association of Zollinger-Ellison Syndrome
- Ferromagnetic Transition of Pyrochlore Compound Yb_2Ti_2O_7
- Ferromagnetic Transition of Pyrochlore Compound Yb_2Ti_2O_7
- Contact Electrification on Thin SrTiO_3 Film by Atomic Force Microscope
- Magnetic Structures and Spin States of NdBaCo_2O_(Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
- Magnetic Structure of Cu_Zn_Cr_2Se_4 (Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
- Studies on Magnetic Excitation Spectra of High-T_c Superconductors (Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
- Magnetic Structures and Spin States of NdBaCo_2O_5 (Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
- Effects of "Stripes" on the Magnetic Excitation Spectra of La_Nd_Sr_CuO_4 (Condensed Matter: Electronic Structure, Electrical, Magnetic and Optical Properties)
- Classic Polyarteritis Nodosa Presenting Rare Clinical Manifestations in a Patient with Hemophilia A
- Structural and Electronic Properties of Adsorbed Thiophene on Cu(111) Studied by S K-Edge X-Ray Absorption Spectroscopy
- Surface Structure of N/Pd(100)-c(2 × 2) Determined by Tensor Low Energy Electron Diffraction Analysis
- Structure, Composition, and Vibrational Property of Iodine-Doped Polyvinyl Alcohol Studied by Temperature-Dependent I K-Edge Extended X-Ray-Absorption Fine Structure
- Local Structures of RbBr_xCl_ and CuBr_xCl_ Solid Solutions Studied by Temperature-Dependent Br K-Edge Extended X-Ray-Absorption Fine-Structure Spectroscopy
- Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma
- Behaviors of carbon atom density in hydrocarbon and fluorocarbon plasmas
- Measurement of Einstein's A Coefficient of the 296.7 nm Transition Line of the Carbon Atom
- Measurement of Carbon Atom Density in High Density Plasma Process
- CD4- and CD56-positive T-cell line MTA, established from natural killer-like T-cell leukemia/lymphoma
- Prevalence of Intravascular Large B-Cell Lymphoma with Bone Marrow Involvement at Initial Presentation
- F-Blast Is a Useful Marker for Differentiating Hypocellular Refractory Anemia From Aplastic Anemia
- X-Ray Mask Distortion Induced in Back-Etching Preceding Subtractive Fabrication: Resist and Absorber Stress Effect
- Reduction of X-Ray Irradiation-Induced Pattern Displacement of SiN Membranes Usirng H^+ Ion Implantation Technique
- New Computed Tomography Algorithm of Electrostatic Force Microscopy Based on the Singular Value Decomposition Combined with the Discrete Fourier Transform
- Simulated Computed Tomography for the Reconstruction of Vacancies Using an Atomic Force Microscope Image
- Stability of Densely Contact-Electrified Charges on Thin Silicon Oxide in Air
- Feasibility Study on a Novel Type of Computerized Tomography Based on Scanning Probe Microscope
- Phase Transition of Contact-Electrified Negative Charges on a Thin Silicon Oxide in Air
- Parameter Dependence of Stable State of Densely Contact-Electrified Electrons on Thin Silicon Oxide
- Potentiometry Combined with Atomic Force Microscope
- Charge Storage on Thin SrTiO_3 Film by Contact Electrification ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique
- Aortic Arch Aneurysm of Takayasu Arteritis Associated with Entero-Behcet Disease
- Observation of GaAs(110) Surface by an Ultrahigh-Vacuum Atomic Force Microscope
- Atomically Resolved Image of Cleaved GaAs(110) Surface Observed with an Ultrahigh Vacuum Atomic Force Microscope
- Cytotoxic molecules expressed by intraepithelial lymphocytes may be involved in the pathogenesis of acute gastric mucosal lesions
- Study of Pulse Erasing on Phase-Change Erasable (PCE) Sampled Servo Disc : Media
- New Disk Structure for Million Cycle Overwritable Phase Change Optical Disk
- Conformal Chermical Vapor Deposition TiN(111) Film Formation as an Underlayer of Al for Highly Reliable Interconnects
- Characterization of Direct-Contact Via Plug Formed by Using Selective Aluminum Chemical Vapor Deposition
- Improvement in Radiation Stability of SiN X-Ray Mask Membranes
- Recording and Erasing Characteristics at a Wavelength of 680 nm for a Phase-Change Disk Designed for 830 nm Wavelength
- Thin Injection-Molded Substrate for High Density Recording Phase-Change Rewritable Optical Disk
- Metalorganic Chemical Vapor Deposition of Aluminum-Copper Alloy Films
- Improvement of Gap-Filling Property of O_3-tetraethylorthosilicate (TEOS) Film by Ethanol Surface Treatment
- Optically High Transparent SiN Mask Membrane with Low Stress Deposited by Low Pressure Chemical Vapor Deposition
- Unusual Anomalous Hall Resistivities of CuCr_2S_4, Cu_Zn_Cr_2Se_4 and Cr_3Te_4
- Improvement of NASH with two-year treatment with oral polyenephosphatidylcholine
- Normally-Off AlGaN/GaN HEMTs with Thin InGaN Cap Layer
- Measurement of Spatial Distribution of SiF_4 and SiF_2 Densities in High Density SiF_4 Plasma Using Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
- Spatial Distribution Measurement of Absolute Densities of CF and CF_2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
- Monoclonal antibodies against mouse splenic stromal cells
- Kinetics of monocytoid B lymphocytes in localized inflammatory lesions induced by lipopolysaccharide in mice
- EARLY CARCINOMA OF THE APPENDIX VERMIFORMIS
- The role of a new fibronectin receptor p55 in liver metastasis by mouse lymphoma
- Severe heart failure due to ductal constriction caused by maternal indomethacin
- Effect of the Combination of a Local OK-432 Injection and Hyperthermia on SCC VII Tumors in Mice
- Low-Coherence Interferometry-Based Non-Contact Temperature Monitoring of a Silicon Water and Chamber Parts during Plasma Etching
- Time Dependent Dielectric Breakdown of Thin Silicon Oxide Using Dense Contact Electrification
- Time Evolution of Contact-Electrified Electron Dissipation on Silicon Oxide Surface Investigated Using Noncontact Atomic Force Microscope
- Spatial Distributions of Densely Contact-Electrified Charges on a Thin Silicon Oxide
- Dissipation of Contact Electrified Electrons on Dielectric Thin films with Silicon Substrate
- Development and Characterization of a New Compact Microwave Radical Beam Source
- Effects of Dilution Gases on Si Atoms and SiHx^^+ (X = 0-3) Ions in Electron Cyclotron Resonance SiH_4 Plasmas
- Characterization of myelodysplastic syndrome and aplastic anemia by immunostaining of p53 and hemoglobin F and karyotype analysis : Differential diagnosis between refractory anemia and aplastic anemia
- Asymmetric Hydroformylation of Olefins in Higyly Crosslinked Polymer Matrixes
- Heat Treatment and Steaming Effects of Silicon Oxide upon Electron Dissipation on Silicon Oxide Surface
- Contact Electrification on Thin Silicon Oxide in Vacuum
- Spatial Distribution and Its Phase Transition of Densely Contact-Electrified Electrons on a Thin Silicon Oxide
- Stable-Unstable Phase Transition of Densely Contract-Electrified Electrons on Thin Silicon Oxide
- Reproducible and Controllable Contact Electrification on a Thin Insulator
- Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4 Plasmas
- Primary Angiitis of the Central Nervous System Mimicking Tumor-Like Lesion : Case Report
- Prediction of Clinical Outcome in Patients with Idiopathic Thrombocytopenic Purpura by Evaluating Bone Marrow Clot CD20^+ B Lymphocytes and Morphological Changes of Megakaryocytes
- Acute Graft-Versus-Host Disease of the Large Intestine after Bone Marrow Transplantation
- Control of Ion Bombardment and Species for Ultra Low Temperature Formation of Silicon Nitride Gate Dielectric Films Using Plasma Chemical Vapor Deposition
- Evidence for the role of human immunodeficiency virus type 1 Nef of the Nef function by anti-Nef antibodies.
- Simultaneous In situ Measurement of Silicon Substrate Temperature and Silicon Dioxide Film Thickness during Plasma Etching of Silicon Dioxide Using Low-Coherence Interferometry
- Inactivation of Penicillium digitatum Spores by a High-Density Ground-State Atomic Oxygen-Radical Source Employing an Atmospheric-Pressure Plasma