Ohta Takayuki | Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
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概要
関連著者
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Ohta Takayuki
Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
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ITO Masafumi
Department of Pathology, Japanese Red Cross Nagoya Daiichi Hospital
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OHTA Takayuki
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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Ohta Takayuki
Department Of Electronic Engineering Faculty Of Engineering Osaka University
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Ito Masafumi
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
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KOSHIMIZU Chishio
Yamanashi Technology Development Center, Tokyo Electron AT Ltd.
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MATSUDO Tatsuo
ES Core Technology Development Department, Tokyo Electron AT Ltd.
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TUCHITANI Shigeki
Department of Opto-Mechatronics, Faculty of Systems Engineering, Wakayama University
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Matsudo Tatsuo
Es Core Technology Development Department Tokyo Electron At Ltd.
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Koshimizu Chishio
Yamanashi Technology Development Center Tokyo Electron At Ltd.
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Tuchitani Shigeki
Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
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Ohta Takayuki
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo University
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Ohta Takayuki
Department of Chemistry, Graduate School of Science, The University of Tokyo
著作論文
- Low-Coherence Interferometry-Based Non-Contact Temperature Monitoring of a Silicon Water and Chamber Parts during Plasma Etching
- Simultaneous In situ Measurement of Silicon Substrate Temperature and Silicon Dioxide Film Thickness during Plasma Etching of Silicon Dioxide Using Low-Coherence Interferometry