Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2003-02-15

著者

• ITO Masafumi

  Department of Pathology, Japanese Red Cross Nagoya Daiichi Hospital

• Hori Masaru

  Department Of Quantum Engineering Nagoya University

• Hori M

  Department Of Quantum Engineering Graduate School Of Engineering Nagoya University

• Fujita Kazushi

  Department Of Quantum Engineering Graduate School Of Engineering Nagoya University

• GOTO Toshio

  Department of Quantum Engineering, Nagoya University

• Hori Masaru

  Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ

• Ito Masafumi

  Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University

• Goto T

  Department Of Quantum Engineering Nagoya University

• Ito Masafumi

  Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi

• Goto T

  Department Of Quantum Engineering Graduate School Of Engineering Nagoya University

• Goto Toshio

  Department Of Electronics Faculty Of Engineering Nagoya University

• Goto Toshio

  Department Of Electronic Mechanical Engineering Nagoya University

• GOTO Toshio

  Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University

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