Development of Compact C_2F_4 Gas Supply Equipment and Its Application to Etching of Dielectrics in an Environmental Benign Process
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概要
- 論文の詳細を見る
- 2005-07-10
著者
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Hori Masaru
Department Of Quantum Engineering Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Kano Hiroyuki
Nu-ecoengineering Co. Ltd.
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Den Shoji
Katagiri Engineering Co. Ltd.
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TAKAHASHI Shunji
Katagiri Engineering Co., Ltd.
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KATAGIRI Toshirou
Katagiri Engineering Co., Ltd.
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YAMAKAWA Koji
Katagiri Engineering Co., Ltd.
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Takahashi Shunji
Katagiri Engineering Co. Ltd.
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Yamakawa Koji
Katagiri Engineering Co. Ltd.
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Takahashi Shunji
Katagiri Engineering Co., Ltd., 3-5-34 Shitte, Tsurumi-ku, Yokohama 230-0003, Japan
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Den Shoji
Katagiri Engineering Co., Ltd., 3-5-34 Shitte, Tsurumi-ku, Yokohama 230-0003, Japan
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Kano Hiroyuki
NU-Eco Engineering Co., Ltd., Ooaza, Kurozasa Aza, Umazutsumi, Miyoshi, Aichi 470-0201, Japan
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Katagiri Toshirou
Katagiri Engineering Co., Ltd., 3-5-34 Shitte, Tsurumi-ku, Yokohama 230-0003, Japan
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