Surface Modification Process of Contact Lens Using Three-Phase AC Excited Nonequilibrium Atmospheric Pressure Ar Plasma
スポンサーリンク
概要
- 論文の詳細を見る
A surface modification process on the contact lens using a nonequilibrium atmospheric pressure remote plasma excited by three-phase AC power source has been investigated. Two dimensional spatial distributions of optical emissions of Ar and OH were measured, and gas temperature and electron density were estimated using the optical emission spectroscopy. It has been found that the gas temperature in the upstream region of the remote plasma is lower than that in the downstream region due to the interfusion of ambient air. The heat-sensitive material such as plastic could be processed without thermal damage by the nonequilibrium atmospheric pressure remote plasma in the proper low-temperature region.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-05-25
著者
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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KANO Hiroyuki
NU Eco-Engineering Co., Ltd.
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Ito Masafumi
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
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Iwasaki Masahiro
Department Of Mechanical Engineering Doshisha University
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Inui Hirotoshi
Department of Electrical and Electronic Engineering, Graduate School of Science and Technology, Meijo University, Nagoya 468-8502, Japan
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Suzuki Yasuhiko
Central R&D Lab., Menicon Co., Ltd., Kasugai, Aichi 487-0032, Japan
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Sutou Daisuke
Central R&D Lab., Menicon Co., Ltd., Kasugai, Aichi 487-0032, Japan
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Nakada Kazuhiko
Central R&D Lab., Menicon Co., Ltd., Kasugai, Aichi 487-0032, Japan
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Sutou Daisuke
Central R&D Lab., Menicon Co., Ltd., Kasugai, Aichi 487-0032, Japan
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Nakada Kazuhiko
Central R&D Lab., Menicon Co., Ltd., Kasugai, Aichi 487-0032, Japan
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Ito Masafumi
Department of Opto-mechatoronics, Faculty of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan
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Kano Hiroyuki
NU EcoEngineering Co., Ltd., Miyoshi, Aichi 470-0201, Japan
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Kano Hiroyuki
NU Eco Engineering Co., Ltd., Miyoshi, Aichi 470-0201, Japan
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Iwasaki Masahiro
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Iwasaki Masahiro
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Hori Masaru
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Suzuki Yasuhiko
Central R&D Lab., Menicon Co., Ltd., Kasugai, Aichi 487-0032, Japan
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KANO Hiroyuki
NU Eco Engineering Co., Ltd.
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