Surface Loss Probability of Nitrogen Atom on Stainless-Steel in N2 Plasma Afterglow
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概要
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We investigated the loss kinetics of nitrogen (N) atoms in a N2 plasma afterglow using a vacuum ultraviolet absorption spectroscopy technique with an atmospheric-pressure microdischarge hollow cathode lamp. The decay curves of N atom density were fitted with single exponential functions at pressures from 1.33 to 13.3 Pa. The dependence of the decay time constant on the pressure showed that the N atoms were predominantly lost through diffusion to the wall surface. The surface loss probability of N atoms on stainless-steel based on the decay time constant as a function of pressure was estimated to be 0.03.
- 2010-07-25
著者
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Hiramatsu Mineo
Department Of Electrical And Electronic Engineering Meijo University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Kato Satoshi
Department Of Cardiology Komatsushima Red Cross Hospital
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Takeda Keigo
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furocho, Chikusa-ku, Nagoya 464-8603, Japan
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Takeda Keigo
Department of Electric Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Takashima Seigo
Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation, 2268-1 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-0003, Japan
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Kato Satoshi
Department of Electrical and Electronic Engineering, Graduate School of Science and Technology, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Hiramatsu Mineo
Department of Electrical and Electronic Engineering, Graduate School of Science and Technology, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Takashima Seigo
Plasma Center for Industrial Applications, Nagoya Industries Promotion Corporation, Nagoya 463-0003, Japan
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