Contrast Enhancement of Wavelength-Selective Detection of Mid-Infrared Using Localized Atmospheric-Pressure Plasma Treatment
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概要
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A new processing method to enhance the signal contrast of a mid-infrared (MIR) detector integrated with a wavelength-selective function is studied. Using the hydrophilic characteristic of an IR absorber solution, an absorber material is selectively deposited onto a hydrophilically modified area over the hot junctions in the diaphragm of a thermopile detector. The hydrophilic modification of the chip-mounted detector is realized using localized atmospheric Ar + O2 plasma treatment through a stencil mask. Using a thermograph, we measured thermal distributions over a previously fabricated detector, whose absorber material is deposited using a manual manipulator without a position-selective mechanism, and the newly fabricated detector for comparison. The newly fabricated detector exhibited a larger temperature difference between hot and cold junctions than that of the previous detector. The detector has an increased signal contrast of 100% from the baseline at the absorption peak.
- 2010-04-25
著者
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Tashiro Kohji
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University
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Masuno Katsuya
Department of Advanced Science and Technology, Toyota Technological Institute, Nagoya 468-8511, Japan
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Katsuya Masuno
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Shinya Kumagai
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Minoru Sasaki
Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Kohji Tashiro
Department of Future Industry-Oriented Basic Science and Materials, Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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Masaru Hori
Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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