Measurement of Hydrogen Radical Density and Its Impact on Reduction of Copper Oxide in Atmospheric-Pressure Remote Plasma Using H2 and Ar Mixture Gases

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概要

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• A 60 Hz alternating current excited atmospheric-pressure plasma with an ultrahigh electron density of over $10^{16}$ cm-3 employing H2/Ar [$\aku p(\text{H$_{2}$})/p(\text{H$_{2}$}+\text{Ar})$ 1--3%] gases was used to reduce copper oxides on copper. The remote plasma reduced CuO and Cu2O at room temperature. The ground-state hydrogen (H) radical density in the atmospheric-pressure plasma was measured by vacuum ultraviolet absorption spectroscopy using a micro hollow cathode lamp. The ratio of reduction of amount of CuO flux to the H radical flux was determined from the measured H radical density and gas temperature.

• 2010-12-25

著者

• Kondo Hiroki

  Deparment Of Physics Saga University

• Hori Masaru

  Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ

• KANO Hiroyuki

  NU Eco-Engineering Co., Ltd.

• Sekine Makoto

  Department Of Electrical Engineering And Computer Science Nagoya University

• Ishikawa Kenji

  Department Of Electrical Engineering And Computer Science Nagoya University

• Takeda Keigo

  Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan

• Takeda Keigo

  Department of Electric Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan

• Sekine Makoto

  Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan

• Inui Hirotoshi

  Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Yoshida Naofumi

  Fuji Machine Mfg. Co., Ltd., Chiryu, Aichi 472-8686, Japan

• Inui Hirotoshi

  Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan

• Inui Hirotoshi

  Department of Electrical and Electronic Engineering, Graduate School of Science and Technology, Meijo University, Nagoya 468-8502, Japan

• Ishikawa Kenji

  Department of Earth and Space Science, Graduate School of Science, Osaka University, 1-1 Machikaneyama, Toyonaka, Osaka 560-0043, Japan

• Kano Hiroyuki

  NU Eco-Engineering Co., Ltd., Miyoshi, Aichi 470-0201, Japan

• Kano Hiroyuki

  NU Eco Engineering Co., Ltd., Miyoshi, Aichi 470-0201, Japan

• Kondo Hiroki

  Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan

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