Evaluation of CF_2 Radical as a Precursor for Fluorocarbon Film Formation in Highly Selective SiO_2 Etching Process Using Radical Injection Technique

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-06-15

著者

• Takahashi K

  Department Of Physical Electronics Tokyo Institute Of Technology

• Takahashi K

  National Inst. Res. In Inorganic Materials Ibaraki Jpn

• Ikeda Makoto

  Faculty Of Technology Tokyo University Of Agriculture And Technology

• Hori Masaru

  Department Of Quantum Engineering Nagoya University

• TAKAHASHI Kaoru

  Department of Applied Physics, Tokyo University of Agriculture and Technology

• Ikeda M

  Sony Corporation Research Center

• GOTO Toshio

  Department of Quantum Engineering, Nagoya University

• INAYOSHI Muneto

  Department of Quantum Engineering, School of Engineering, Nagoya University

• Ikeda M

  Tdk Electronic Device Business Group Akita Jpn

• Hori Masaru

  Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ

• Takahashi K

  Department Of Physical Electronics Tokyo Institute Of Tecnology

• Inayoshi Muneto

  Department Of Quantum Engineering School Of Engineering Nagoya Univeristy

• Takahashi K

  Tokyo Inst. Technol. Yokohama Jpn

• Takahashi Kensuke

  Department Of Electrical And Electronic Engineering Musashi Institute Of Technology

• Takahashi Kuniharu

  Graduate School Of Science And Technology Niigata University

• Takahashi Kazuhiko

  National Research Institute For Metals Tsukuba Laboratories:sanyo Elect. Co. Ltd.

• Takahashi Kouchiro

  National Institute For Research In Inorganic Materials

• Ito M

  Wakayama Univ. Wakayama Jpn

• Ikeda M

  Toshiba Corp. Kawasaki Jpn

• TAKAHASHI Kunimasa

  Department of Quantum Engineering, School of Engineering, Nagoya Univeristy

• Takahashi Kasuke

  National Laboratory For High Energy Physics

• Goto Toshio

  Department Of Electronics Faculty Of Engineering Nagoya University

• 後藤 俊夫

  Imram Tohoku University

• Takahashi Katsuaki

  Department Of Applied Chemistry Okayama University

• Goto Toshio

  Department Of Electronic Mechanical Engineering Nagoya University

• TAKAHASHI Kenji

  Semiconductor Research Laboratory, Pioneer Electronic Corporation

• GOTO Toshio

  Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University

• Inayoshi Muneto

  Department of Electrical Engineering, Hiroshima University

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