Modification Effect of a-Si_<1-x> N_x:H Surface by Hydrogen Radicals
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-02-28
著者
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Ikeda Makoto
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Yamaguchi M
Department Of Physics Yokohama National University
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Ikeda M
Sony Corporation Research Center
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Yamamoto Y
College Of Engineering Hosei University
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Ikeda M
Tdk Electronic Device Business Group Akita Jpn
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Kurihara Koji
Faculty Of Technology Tokyo University Of Agricuture And Technology
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Yamamoto Yuichi
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
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Yamamoto Y
Nippon Steel Corp. Kawasaki Jpn
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Yamamoto Y
Nara Inst. Sci. And Technol. Nara Jpn
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Inayoshi Muneto
Department Of Quantum Engineering School Of Engineering Nagoya Univeristy
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NAGAYOSHI Hiroshi
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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KAMISAKO Koichi
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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Tarui Yasuo
The School of Science and Engineering, Waseda University
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NAGAYOSHI Hiroshi
Faculty of Technology, Tokyo University of Agriculture and Technology
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IKEDA Makoto
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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YAMAGUCHI Misako
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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Yamaguchi Masakazu
Research And Development Center Toshiba Corporation
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Yamaguchi Masafumi
Ntt Ibaraki Electrical Communication Laboratories Nippon Telegraph And Telephone Corporation
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Yamaguchi Masafumi
Ntt Electrical Communications Laboratories
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Yamamoto Yoshitugu
Department Of Chemistry For Materials Faculty Of Engineering Mie University
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Ito M
Wakayama Univ. Wakayama Jpn
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Ikeda M
Toshiba Corp. Yokohama Jpn
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Ikeda M
Toshiba Corp. Kawasaki Jpn
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Yamaguchi M
Gifu Pharmaceutical University
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Tarui Y
National Institute Of Advanced Industrial Science And Technology
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Kamisako K
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Kuroiwa K
Faculty Of Technology Tokyo University Of Agricuture And Technology
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TARUI Yasuo
National Institute of Advanced Industrial science and Technology
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Yamaguchi M
Nagoya Univ. Nagoya Jpn
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Kamisako Koichi
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
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Nagayoshi H
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Yamamoto Y
Material Science Japan Advanced Institute Of Science And Technology
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Tarui Yasuo
The School Of Science And Engineering Waseda University
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