Measurement of Absolute Densities of Si, SiH and SiH_3 in Electron Cyclotron Resonance SiH_4/H_2 Plasma (<Special Issue> Plasma Processing)
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-07-30
著者
-
Hiramatsu M
Nano Factory Graduate School Of Science And Technology Meijo University
-
YAMAMOTO Yasuo
School of Engineering, Nagoya University
-
NOMURA Hideshi
School of Engineering, Nagoya University
-
TANAKA Takao
School of Engineering, Nagoya University
-
HIRAMATSU Mineo
Faculty of Science and Technology, Meijo University
-
HORI Masaru
School of Engineering, Nagoya University
-
GOTO Toshio
School of Engineering, Nagoya University
-
Yamamoto Y
College Of Engineering Hosei University
-
Yamamoto Yuichi
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
-
Yamamoto Y
Nippon Steel Corp. Kawasaki Jpn
-
Hori Masaru
School Of Engineering Nagoya University
-
Hiramatsu Makoto
Memory Products Business Promotion Center Canon Inc.
-
Yamamoto Y
Nara Inst. Sci. And Technol. Nara Jpn
-
Yamamoto Yoshitugu
Department Of Chemistry For Materials Faculty Of Engineering Mie University
-
Nomura Hideshi
School Of Engineering Nagoya University
-
Hiramatsu M
Toshiba Corp. Yokohama Jpn
-
Yamamoto Y
Material Science Japan Advanced Institute Of Science And Technology
関連論文
- 9. フルオロカーボンプラズマを用いたナノ構造体の形成(材料プロセス用フルオロカーボンプラズマ-現状と展望-)
- 大気圧プラズマを用いたミドリカビの殺菌機構に関する考察
- マイクロホローカソードプラズマを用いた金属原子密度測定のための吸収分光用光源の開発
- 非平衡大気圧プラズマを用いたミドリカビの殺菌メカニズムの検証
- Enhanced Tensile Strength and Plasticity of Zr-Cu-Al Bulk Glassy Alloys at Cryogenic Temperatures
- プラズマCVDを用いたカーボンナノウォールの成長(有機結晶の新展開)
- ECR C_4F_8プラズマにおけるCFxラジカル絶対密度の空間分布の計測とその分布形成機構
- Heterogeneous Process of Disordering and Structural Refinement in Ni_3Al during Severe Plastic Deformation by High-Pressure Torsion
- Effect of Nanocrystallization and Twinning on Hardness in Ni_3Al Deformed by High-Pressure Torsion
- シリコン表面の窒化初期過程とエネルギーバンドギャップの形成
- プラズマCVD法を用いたカーボンナノウォールの形成
- 非平衡大気圧プラズマを用いた柑橘ミドリカビ胞子殺菌手法 : 殺菌要因の検討(有機材料,一般)
- プラズマ技術とバイオアプリケーション--非平衡大気圧プラズマのミドリカビ殺菌への応用 (特集 生体触媒研究の新潮流)
- ラジカル制御プラズマとその応用
- 大気圧プラズマを用いたシリコン酸化膜の高速加工
- プラズマ中のラジカル制御によるカーボンナノウォールの合成
- 21409 プラズマCVD法で作製したカーボンナノウォールの高速成長及び表面積制御(デバイス&配線技術2,OS.1 機械工学が支援する微細加工技術(半導体・MEMS・NEMS),学術講演)
- 21408 プラズマCVD法で作製したカーボンナノウォールの成長メカニズム(デバイス&配線技術2,OS.1 機械工学が支援する微細加工技術(半導体・MEMS・NEMS),学術講演)
- 高密度プラズマプロセッシングの現状と将来展望(高密度プラズマとその応用技術の最前線)
- フルオロカーボンプラズマを用いたナノ構造体の形成
- カーボンナノウォールを用いた新機能デバイスの開発
- カーボンナノウォールの超精密形成と機能デバイスへの応用
- Nucleation and Growth in Undercooled Melts of Bulk-Metallic-Glass Forming Zr_Ni_Al_ Alloy
- Cold-Rolled Zr_Cu_Ni_Al_ Bulk Amorphous Alloys with Tensile Plastic Elongation at Room Temperature
- Pseudo Float Melting State in Ladle Arc-Melt-Type Furnace for Preparing Crystalline Inclusion-Free Bulk Amorphous Alloy
- Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma
- Diamond Film Formation by OH Radical Injection from Remote Microwave H_2/H_2O Plasma into Parallel-Plate RF Methanol Plasma
- High-Rate Anisotropic Ablation and Deposition of Polytetrafluoroethylene Using Synchrotron Radiation Process
- Synthesis of Diamond Using RF Magnetron Methanol Plasma Chemical Vapor Deposition Assisted by Hydrogen Radical Injection
- Measurement of Absolute Densities of Si, SiH and SiH_3 in Electron Cyclotron Resonance SiH_4/H_2 Plasma ( Plasma Processing)
- Kinetics of Radicals in CF_4 and C_4F_8 Electron Cyclotron Resonance Plasmas
- Measurement of Terrace Width Distribution on an Si(110) Surface Using High-Temperature Scanning Tunneling Microscopy
- High-Temperature Scanning Tunneling Microscopy Observation of a (15, 17, 1) Facet Structure on a Si(110) Surface
- High-Temperature Scanning Tunneling Microscopy Study of the Phase Transition of 16-Structure Appearing on a Si(110) Surface
- Correlation between Film Thickness and Critical Current Density of Sm_Ba_Cu_3O_ Films Deposited by Pulsed Laser Deposition : Superconductors
- A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam
- Effect of Hydrogen-Radical Annealing for SiO_2 Passivation
- Critical Current Density Enhancement around a Matching Field in ErBa_2Cu_3O_ Films with BaZrO_3 Nano-Rods
- Characteristics of Hall Accelerator with He, H_2, CH_4, O_2 and Ar Gases
- Characteristics of Hall Accelerator for Helium-Ion Beam Extraction
- Application of a Hall Accelerator to Diamondlike Carbon Film Coatings
- Red-to-Yellow Electroluminescence from CdSe Microcrystal-Doped Indium Tin Oxide Thin Films
- Second-Harmonic Generation from Thermally Poled Mixed Alkali Silicate Glasses Containing Various Alkaline-Earth Oxides
- Relaxation of Free Volume in Zr_Cu_Al_ Bulk Metallic Glasses Studied by Positron Annihilation Measurements
- Glassy Solidification Criterion of Zr_Cu_Al_ Alloy
- Drastic Increase in the Toughness of Structural Relaxed Hypoeutectic Zr_Cu_Al_ Bulk Glassy Alloy
- Relations between the thermal and mechanical properties of cast Zr-TM-Al (TM: Cu, Ni, or Co) bulk glassy alloys (Special issue on bulk metallic glasses: selected papers from the fifth international conference on bulk metallic glasses (BMGV))
- Fatigue-Strength Enhancement of Cast Zr_Cu_Al_ Glassy Alloys
- Relaxation and Crystallization Behavior of the Zr_Cu_Al_ Metallic Glass
- Evolution of Mechanical Properties of Cast Zr_Cu_Al_ Glassy Alloys by Structural Relaxation
- Characterization of Crystalline Inclusions in Cast Bulk Zr-Cu-Ni-Al Glassy Alloy
- Effect of Ni Addition on Fatigue Properties of Bulk Glassy Zr_Cu_Al_ Alloys
- Electron Beam Welding of Zr_Cu_Ni_Al_ Bulk Glassy Alloys
- Relationship Between the Liquidus Surface and Structures of Zr-Cu-Al Bulk Amorphous Alloys
- Oxygen Embrittlement and Effect of the Addition of Ni Element in a Bulk Amorphous Zr-Cu-Al Alloy
- Rotating-Beam Fatigue Properties of Pd_Cu_Ni_P_ Bulk Glassy Alloy
- Enhancement of Ductility and Plasticity of Zn_Cu_Al_Ni_5 Bulk Glassy Alloy by Cold Rolling
- Growth of a Single Al_Cu_Fe_ Icosahedral Quasicrystal Using the Czochralski Method and Annealing Removal of Strains
- Fatigue Properties and Microstructures of Zr_Cu_Al_Ni_5 Bulk Glassy Alloys
- Preparation of Large Grained AL_Cu_Fe_ Icosahedral Quasivrystal Directly from the Melt
- Growth of Icosahedral Single Quasicrystal and 1/1-Cubic Approximant Single Crystal in an Al-Li-Cu Alloy System by the Czodhralski Method
- Nanocrystalline Zr-Based Bulk Glassy Alloys with High Flexural Strength
- Rotating-Beam Fatigue Strength of Pd_ Cu_ Ni_ P_ Bulk Amorphous Alloy
- プラズマ誘起表面科学の魅力
- Study of Surface Processes in the Digital Etching of GaAs
- Modification Effect of a-Si_ N_x:H Surface by Hydrogen Radicals
- Specimen preparation for high-resolution transmission electron microscopy using focused ion beam and Ar ion milling
- Structural Characterization of High-Quality ZnS Epitaxial Layers Grown on GaAs Substrates by Low-Pressure Metalorganic Chemical Vapor Deposition : Surfaces, Interfaces, and Films
- Evaluation of Thermal Expansion Coefficient of Twinned YBa_2Cu_3O_7-δ Film for Prediction of Crack Formation of Various Substrates
- Intense Ultraviolet Electroluminescence Properties of the High-Power InGaN-Based LEDs Fabricated on Patterned Sapphire Substrates
- Large-Capacity and High-Speed Magnetic Field Modulation Recording for 3.5" Magneto-Optical Disk Drive : Drive Technology
- Large-Capacity and High-Speed Magnetic Field Modulation Recording for 3.5" Magneto-Optical Disk Drive
- Relative Intensity Noise of DFB LD's with Near and Far End Reflections
- Deterioration of the Frequency-Conversion Efficiency of a LiTaO_3 Waveguide Device with Nonlinear Quasi-Phase-Matched Second-Harmonic Generation
- Quasi-Phase-Matched Second-Harmonic Generation in a Periodic-Lens Sequence Waveguide with a Relatively Wide Wavelength-Tuned Width
- Evidence of Mobile Ag and Growth Mechanism of YBa_2Cu_3O_7-y Films Deposited on Cube Textured Ag Tape by Chemical Vapor Deposition
- Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System : Etching and Deposition Technology
- Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System
- In situ Scanning Tunneling Microscopy Nanotip Fabrication with Field-Enhanced Surface Diffusiorn, Thermal Evaporation and Field Emission
- Theory of Transport Through a Single Atomic Junction ( Scanning Tunneling Microscopy)
- 液中プラズマを用いたナノグラフェンの高速合成技術 (特集 「グラフェン」の実務的な視点での開発トレンド)
- プラズマCVD法によるカーボンナノウォールの制御合成
- Selective Deposition of Silicon by Mercury Sensitized Photochermical Vapor Deposition
- Roles of SiH_3 and SiH_2 Radicals in Particle Growth in rf Silane Plasmas
- Effects of Dilution Gases on Si Atoms and SiHx^^+ (X = 0-3) Ions in Electron Cyclotron Resonance SiH_4 Plasmas
- Holographic Measurement of Lower Loss Tangent Using a Beam of Variable Cross Section(2nd Report) -Measuring Theory-
- Etching and Surface Modification of GaAs by Hydrogen Radicals Generated by Hydrogen Microwave Afterglow Method
- Holographic Measurement of Lower Loss Tangent Using a Beam of Variable Cross Section(1st Report)-Calculation and Measurement of Amplitude Distribution-
- Measurement of Complex Volume Elastic Modulus of Liquid by Holography
- Effect of Axial Force on Holographic Measurement of Complex Elastic Modulus
- Vibration Analysis of a Loudspeaker by Holography
- Analysis of Device Performance by Quasi Three-Dimensional Simulation for Thin Film Polycrystalline Silicon Solar Cells with Columnar Structure : Semiconductors
- Optimum Designing of Single Crystalline Silicon Thin Film Solar Cells with Graded Active Layer : Semiconductors
- Passivation Effect of Plasma Chemical Vapor Deposited SiNx on Single-Crystalline Silicon Thin-Film Solar Cells
- O_2/N_2ガスを用いた60Hz非平衡大気圧プラズマによるソルダーレジストとドライフィルムの表面改質
- 第71回応用物理学会学術講演会(2010年秋季)
- 複数金属元素同時モニタリング光源を用いた吸収分光法による透明導電膜成膜スパッタリングプロセスの診断
- Fabrication of Fe-Based Metallic Glass Particle Reinforced Al-Based Composite Materials by Friction Stir Processing
- Interface Microstructure and Mechanical Properties of Dissimilar Friction Stir Welded Joints between Zr_Cu_Ni_5Al_ Bulk Metallic Glass and Pure Al
- Kinetics of Radicals in CF 4 and C 4F 8 Electron Cyclotron Resonance Plasmas