Thin-Film Bulk Acoustic Resonators Employing ZnO/Pyrex-Glass Composite Diaphragm Structure
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-05-30
著者
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Yamaguchi M
Department Of Physics Yokohama National University
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YAMAGUCHI Masatsune
Department of Dentistry, Tokyo Metropolitan Geriatric Medical Center
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Hamamoto K
Univ. Tokyo Tokyo Jpn
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Hashimoto Ken-ya
Department Of Electrical Engineering Chiba University
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Hashimoto Ken-ya
Department Of Electrical And Electronics Engineering Chiba University
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Yamaguchi Masakazu
Research And Development Center Toshiba Corporation
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Yamaguchi Masafumi
Ntt Ibaraki Electrical Communication Laboratories Nippon Telegraph And Telephone Corporation
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Yamaguchi Masafumi
Ntt Electrical Communications Laboratories
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Yamaguchi Masatsune
Department Of Dentistry And Oral Surgery Tokyo Metropolitan Geriatric Center
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Hashimoto K
Research Center For Advanced Science And Technology The University Of Tokyo
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MAKISHIMA Yoshiki
Department of Electrical and Electronics Engineering, Chiba, University
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Yamaguchi M
Nagoya Univ. Nagoya Jpn
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Makishima Yoshiki
Department Of Electrical And Electronics Engineering Chiba University
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HASHIMOTO Ken-ya
Department of Electrical and Electronic Engineering, Chiba University
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