Analysis of Local Leakage Current of Pr-Oxide Thin Films with Conductive Atomic Force Microscopy
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概要
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We have investigated the local leakage current in Pr-oxide thin films formed on Si(001) and Si(111) substrate by conductive atomic force microscopy. In Pr-oxide films formed on Si(111) substrates, many current leakage spots are observed in current images compared to that on Si(001) substrates. We found that the current conduction mechanism in Pr-oxide films is considered a Poole--Frenkel conduction. The X-ray photoelectron spectroscopy analysis revealed that cubic Pr2O3 is preferentially formed near the Pr-oxide/Si(111) interface compared with Si(001) samples. We also found that O2 annealing effectively reduces the leakage current in Pr-oxide films. It is considered that oxygen vacancies in Pr-oxide dominate the leakage current of oxide thin films.
- 2011-04-25
著者
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Sakashita Mitsuo
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Kondo Hiroki
Deparment Of Physics Saga University
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Zaima Shigeaki
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Kato Kimihiko
Department Of Cardiovascular Medicine Gifu Prefectural Government Tajimi Hospital
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Kato Yuzo
Department Of Oral Pathopharmacology Course Of Medical And Dental Sciences Graduate School Of Biomed
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Nakatsuka Osamu
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Takeuchi Wakana
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Adachi Masaki
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Zaima Shigeaki
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Kato Kimihiko
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Kato Yuzo
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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