Formation of Metal/Silicon Contacts for ULSI and Induced Defects by Silicidation
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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Zaima Shigeaki
Department Of Crystalline Materials Science School Of Engineering Nagoya University
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Zaima Shigeaki
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Yasuda Yukio
Department Of Applied Physics Faculty Of Engineering Nagoya University
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