Microscopic Observation of X-Ray Irradiation Damage in Ultra-Thin SiO2 Films
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概要
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X-ray irradiation damage in ultra-thin SiO2 films has been investigated on an atomic scale using scanning tunneling microscopy (STM). From the X-ray photoelectron spectroscopy time-dependent measurement, the creation of hole traps and the successive electron trapping are observed with increasing irradiation time. In both cases, bright spots are observed in the STM images. We conclude that the bright spots which appeared in the hole trapping duration correspond to the hole traps in the SiO2 film. The bright spots which appeared in the electron trapping duration are larger in height and diameter in the STM images than those that appeared in the hole trapping duration. Although most of the bright spots in the hole trapping duration vanish with annealing at 600°C, the larger bright spots remain after the annealing. It is considered that the larger bright spots in the electron trapping duration correspond to leakage sites in the ultra-thin SiO2 films. Moreover, these trap sites are considered to originate from surface defects pre-existing on a clean Si(100) surface.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-30
著者
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Ikeda Hiroya
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Zaima Shigeaki
Center For Cooperative Research In Advanced Science & Technology Nagoya University
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OHMORI Kenji
Venture Business Laboratory, Nagoya University
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Goto Tomokazu
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Yasuda Yukio
Department Of Applied Physics Faculty Of Engineering Nagoya University
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Sakai Akira
Department Of Agricultural Chemistry The University Of Tokyo
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Zaima Shigeaki
Center for Cooperative Research in Advanced Science & Technology, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Goto Tomokazu
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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