Fabrication of Dense Carbon Nanotube Films Using Microwave Plasma-Enhanced Chemical Vapor Deposition
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概要
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Carbon nanotubes (CNTs) were synthesized using microwave plasma-enhanced chemical vapor deposition. Co nanoparticles as catalyst were prepared using excimer laser ablation. Vertically aligned, dense CNT films were grown successfully on a Co-catalyzed Si substrate with a TiN buffer layer. The density of CNTs with a diameter of approximately 6 nm was controllable by changing the deposition time of Co catalytic nanoparticles prior to nanotube growth. CNTs were grown rapidly during the first 3 min of growth, then the growth rate of CNTs decreased markedly. At the early stage of growth, the CNTs grew at an extremely high rate of 300 nm/s.
- 2005-02-15
著者
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Hiramatsu Mineo
Nano Factory Department Of Electrical And Electronic Engineering Meijo University
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NAGAO Hidetoshi
NanoFactory, Department of Materials Science and Engineering, Meijo University
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ANDO Yoshinori
NanoFactory, Department of Materials Science and Engineering, Meijo University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Taniguchi Masaki
Nanofactory Department Of Materials Science And Engineering Meijo University
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Ando Yoshinori
NanoFactory, Department of Materials Science and Engineering, Meijo University, Shiogamaguchi, Tempaku, Nagoya 468-8502, Japan
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Hiramatsu Mineo
Nano Factory, Department of Electrical and Electronic Engineering, Meijo University, Shiogamaguchi, Tempaku, Nagoya 468-8502, Japan
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Nagao Hidetoshi
NanoFactory, Department of Materials Science and Engineering, Meijo University, Shiogamaguchi, Tempaku, Nagoya 468-8502, Japan
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