Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2012-03-25
著者
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Toyoda Hirotaka
Department Of Electrical Engineering And Computer Science Nagoya University
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Den Shoji
Katagiri Engineering Co. Ltd.
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Takeda Keigo
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Sekine Makoto
Department Of Electrical Engineering And Computer Science Nagoya University
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YAMAKAWA Koji
Katagiri Engineering Co., Ltd.
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Hara Yasuhiro
Research Center For Nanodevices And Systems Hiroshima University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Hara Yasuhiro
Research Center For Ultra-precision Science And Technology Graduate School Of Engineering Osaka University
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Yamakawa Koji
Katagiri Engineering Co. Ltd.
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Takeda Keigo
Department of Electric Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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