LOW-TEMPERATURE FORMATION OF poly-Si FILMS BY INDUCTIVELY-COUPLED SILANE PLASMA

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概要

• 論文の詳細を見る
• 1997-12-15

著者

• Sugai Hideo

  Department of Electrical Engineering, Nagoya University

• Toyoda Haruhisa

  Department Of Material Physics Faculty Of Engineering Science Osaka University

• Nishitani M

  Matsushita Electric Ind. Co. Ltd. Kyoto Jpn

• Nishitani M

  Matsushita Electric Industrial Co. Moriguchi Jpn

• Nishitani Mikihiko

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Nishitani Mikihiko

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• KITAGAWA Masatoshi

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• Toyoda H

  Department Of Electrical Engineering School Of Engineering Nagoya Univeristy

• Toyoda H

  Nagoya Univ. Nagoya Jpn

• Toyoda Hirotaka

  Department Of Electrical Engineering Nagoya University

• Sugai Hideo

  Department Of Electrical Engineering School Of Engineering Nagoya Univeristy

• 菅井 秀郎

  名古屋大

• Sugai Hideo

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• Kitagawa M

  Matsushita Electric Ind. Co. Moriguchi Jpn

• Kitagawa M

  Matsushita Electric Industrial Co.

• Kitagawa M

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Kitagawa Masatoshi

  Corporate Production Engineering Laboratories Matsushita Electric Ind.co. Ltd.

• GOSHIMA Kazutomo

  Department of Electrical Engineering, School of Engineering, Nagoya University

• YAMAZOE Hiroshi

  Matsushita Electric Industrial Co.

• NISHITANI Mikihiko

  Display Device Development Center, Matsushiita Electric Industrial Co.

• YAMAZOE Hiroshi

  Display Device Development Center, Matsushiita Electric Industrial Co.

• 菅井 秀郎

  中部大学工学部電気システム工学科

• Nishitani Mikihiko

  Display Device Development Center Matsushita Electrics Industrial Co. Ltd.

• Kitagawa Masatoshi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Toyoda Hirotaka

  Department Of Electrical Engineering And Computer Science Nagoya University

• 菅井 秀郎

  中部大学

• Goshima Kazutomo

  Department Of Electrical Engineering School Of Engineering Nagoya University

• Sugai Hideo

  Department O Electrical Engineering Nagoya University

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