Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasma

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-06-01

著者

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Toyoda Haruhisa

  Department Of Material Physics Faculty Of Engineering Science Osaka University

• Hiramatsu Takahiro

  Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850

• Hirao T

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• KITAGAWA Masatoshi

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• HIRAO Takashi

  Matsushita Technoresearch Inc.

• GOTO Masashi

  Department of General Medicine and Clinical Epidemiology, Kyoto University Graduate School of Medici

• Toyoda H

  Department Of Electrical Engineering School Of Engineering Nagoya Univeristy

• Toyoda H

  Nagoya Univ. Nagoya Jpn

• Hirao T

  Research Institute For Nano-devices Kochi University Of Technology

• Sugai Hideo

  Department Of Electrical Engineering School Of Engineering Nagoya Univeristy

• Goto M

  Matsushita Electric Industrial Co.

• Kitagawa M

  Matsushita Electric Ind. Co. Moriguchi Jpn

• Kitagawa M

  Matsushita Electric Industrial Co.

• Kitagawa M

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Kitagawa Masatoshi

  Corporate Production Engineering Laboratories Matsushita Electric Ind.co. Ltd.

• GOTO Masashi

  Matsushita Electric Industrial Co.

• TOYODA Hirotaka

  Central Research Laboratory, Matsushita Electric Industrial Co.

• SUGAI Hideo

  Matsushita Technoresearch Inc.

• Kitagawa Masatoshi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Goto Masashi

  Department Of General Medicine And Clinical Epidemiology Kyoto University Graduate School Of Medicin

• Goto Masashi

  Department Of Comprehensive Care And Education Tenri Hospital

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