Substrate Potential Effects on Low-Temperature Preparation of SrTiO_3 Thin Films by RF Magnetron Sputtering

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-12-15

著者

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Hirao Takashi

  Department Of Electrical Engineering Osaka University

• Hiramatsu Takahiro

  Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850

• Hirao T

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• HAYASHI Shigenori

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• KAMADA Takeshi

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• KITAGAWA Masatoshi

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• SHIBUYA Munehiro

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• NISHITSUJI Mitsuru

  Semiconductor Research Center, Matsushita Electric Industrial Co, Ltd.

• TAMURA Akiyoshi

  Semiconductor Research Center, Matsushita Electric Industrial Co, Ltd.

• Shibuya Masato

  Optical Division Nikon Corporation

• Kamada Takeshi

  Central Research Laboratories Matsushita Electric Industrial Co. Lid.

• Hayashi Shinji

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Kobe University

• Kitagawa M

  Matsushita Electric Ind. Co. Moriguchi Jpn

• Kitagawa M

  Matsushita Electric Industrial Co.

• Kitagawa M

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Kitagawa Masatoshi

  Corporate Production Engineering Laboratories Matsushita Electric Ind.co. Ltd.

• Hayashi S

  Department Of Electrical And Electronics Engineering Faculty Of Engineering Kobe University

• Hayashi Shigenori

  Central Research Laboratories Matsushita Electric Ind. Co.

• Hayashi Shigenori

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Hayashi Shigenori

  Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation

• Hayashi Shigenori

  Faculty Of Engineering Osaka University

• Kitagawa Masatoshi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Hayashi S

  Saga Univ. Saga Jpn

• NISHITSUJI Mitsuru

  Electronics Research Laboratory, Matsushita Electronics Corporation

• Shibuya Munehiro

  Optical Division Nikon Corporation

• Nishitsuji M

  Semiconductor Research Center Matsushita Electric Industrial Co Ltd.

• Nishitsuji Mitsuru

  Semiconductor Device Research Center Matsushita Electronics Corporation

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Tamura Akiyoshi

  Semiconductor Research Center Matsushita Electric Industrial Co Ltd.

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