Synthesis of β-SiC Layer in Silicon by Carbon Ion 'Hot' Implantation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-02-15

著者

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Hirao Takashi

  Department Of Electrical Engineering Osaka University

• Hiramatsu Takahiro

  Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850

• Hirao T

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• DEGUCHI Masahiro

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• KITABATAKE Makoto

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• IZUMI Tomio

  Department of Electronic Engineering, Faculty of Engineering, Tokai University

• ARAI Naoki

  Department of Electronics, Faculty of Engineering, Tokai University

• Hirao T

  Research Institute For Nano-devices Kochi University Of Technology

• Izumi Teruo

  Superconductivity Research Laboratory Istec

• Arai N

  Department Of Electronics Faculty Of Engineering Tokai University

• Arai Naoki

  Department Of Chemistry Nagaoka University Of Technology

• Izumi T

  Superconductivity Research Laboratory International Superconductivity Technology Center

• DEGUCHI Mikio

  Niihama National College of Technology

• Deguchi M

  Niihama National Coll. Technol. Ehime Jpn

• Deguchi Masahiro

  Central Research Laboratories Matsushita Electric Industrial Co. Lid.

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Kitabatake Makoto

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Kitabatake Makoto

  Central Research Lab. Matsushita Electr. Ind. Co.

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