Simple Direct Monitoring of SiH_3 Radical and Particulates in a Silane Plasma with Ultraviolet Transmission Spectroscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-04-01

著者

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• 後藤 誠

  北陸職業能力開発大学校

• Sugai Hideo

  Department of Electrical Engineering, Nagoya University

• Hirao Takashi

  Department Of Electrical Engineering Osaka University

• Toyoda Haruhisa

  Department Of Material Physics Faculty Of Engineering Science Osaka University

• Hiramatsu Takahiro

  Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850

• Hirao T

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• KITAGAWA Masatoshi

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• GOTO Masashi

  Department of General Medicine and Clinical Epidemiology, Kyoto University Graduate School of Medici

• Toyoda H

  Department Of Electrical Engineering School Of Engineering Nagoya Univeristy

• Toyoda H

  Nagoya Univ. Nagoya Jpn

• Hirao T

  Research Institute For Nano-devices Kochi University Of Technology

• Toyoda Hirotaka

  Department Of Electrical Engineering Nagoya University

• Sugai Hideo

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• Goto M

  Matsushita Electric Industrial Co.

• Kitagawa M

  Matsushita Electric Ind. Co. Moriguchi Jpn

• Kitagawa M

  Matsushita Electric Industrial Co.

• Kitagawa M

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Kitagawa Masatoshi

  Corporate Production Engineering Laboratories Matsushita Electric Ind.co. Ltd.

• GOTO Masashi

  Matsushita Electric Industrial Co.

• Kitagawa Masatoshi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Toyoda Hirotaka

  Department Of Electrical Engineering And Computer Science Nagoya University

• Sugai Hideo

  Department O Electrical Engineering Nagoya University

• Goto Masashi

  Department Of General Medicine And Clinical Epidemiology Kyoto University Graduate School Of Medicin

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Goto Masashi

  Department Of Comprehensive Care And Education Tenri Hospital

• Goto Masashi

  Department of Applied Chemistry, Faculty of Engineering, Nagoya University

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