(100) Preferred Orientation of Spinel-Type Iron Oxide Films Prepared by Plasma-Enhanced Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
Spinel-type iron oxide films were prepared on glass substrates at 4OO℃ by plasma-enhanced metalorganic chemical vapor deposition using iron (III) acetylacetonate and oxygen as source gas and oxidizing gas, respectively. The effects of angle (θ) of the source and oxygen gas nozzle to the substrate surface, applied negative dc bias voltage and addition of reducing gas, H_2, on the orientation of the films have been investigated. Highly crystalline and (100)-oriented spinel-type iron oxide films were obtained under conventional conditions only when θ was lower than 20°. However, even for θ higher than 20°, highly crystalline and (100)-oriented films could be obtained by applying negative do bias voltage or adding H_2 during the deposition. Magnetic properties and microstructures of the films were also examined.
- 社団法人応用物理学会の論文
- 1995-04-15
著者
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Hirao Takashi
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Hirao Takashi
Department Of Electrical Engineering Osaka University
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Hiramatsu Takahiro
Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850
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Hirao T
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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TAKAYAMA Ryoichi
Central Research Laboratories, Matsushita, Electric Industrial Co., Ltd.
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Hirao T
Research Institute For Nano-devices Kochi University Of Technology
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FUJII Eiji
Industrial Technology Center of Okayama Prefecture
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FUJII Eiji
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.,
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TOMOZAWA Atsushi
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.,
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TORII Hideo
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.,
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Takayama Ryoichi
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Takayama Ryoichi
Human Environment Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Fujii Eiji
First Department Of Oral And Maxillofacial Surgery Faculty Of Dentistry Tokyo Medical And Dental Uni
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Fujii Eiji
Research Laboratories Ii Tamanoi Vinegar Co. Ltd.
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Torii H
Human Environment Research Laboratory Matsushita Electric Industrial Co. Ltd.
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Torii Hideo
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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TOMOZAWA Atsushi
Human Environment Systems Development Center, Matsushita Electric Industrial Co., Ltd.
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Hirano Takashi
Central Research Laboratories, Matsushita Electric Industrial Co. Ltd.
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Tomozawa A
Human Environment Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Hirano Takashi
Central Research Laboratories Matsushita Electric Ind. Co. Ltd.
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