Application of Ferroelectric Thin Films to Si Devices (Special Issue on Quarter Micron Si Device and Process Technologies)

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概要

• 論文の詳細を見る

• Characterization of silicon devices incorporating the capacitor which uses ferroelectric thin films as capacitor dielectrics is presented. As cases in point, a DRAM cell capacitor and an analog/digital silicon IC using the thin film of barium strontium titanate (Ba_<1-x>Sr_xTiO_3) are examined. Production and characterization of the ferroelectric thin films are also described, focusing on a Metal Organic Deposition technique and liquid source CVD.

• 社団法人電子情報通信学会の論文
• 1994-03-25

著者

• Inoue Atsuo

  Electronics Research Laboratory Matsushita Electronics Corporation

• Mcmillan Larry

  Symetrix Corporation

• FUJII Eiji

  Industrial Technology Center of Okayama Prefecture

• Inoue A

  Mitsubishi Electric Corp. Itami‐shi Jpn

• Shimada Y

  Tokyo Inst. Technol. Yokohama Jpn

• Hayashi S

  Matsushita Electronics Corp. Kyoto Jpn

• SHIMADA Yasuhiro

  Electronics Research Laboratory, Matsushita Electronics Corporation

• NASU Toru

  Electronics Research Laboratory, Matsushita Electronics Corporation

• NAGANO Yoshihisa

  Electronics Research Laboratory, Matsushita Electronics Corporation

• MATSUDA Akihiro

  Electronics Research Laboratory, Matsushita Electronics Corporation

• ARITA Koji

  Electronics Research Laboratory, Matsushita Electronics Corporation

• FUJII Eiji

  Electronics Research Laboratory, Matsushita Electronics Corporation

• OTSUKI Tatsuo

  Electronics Research Laboratory, Matsushita Electronics Corporation

• UEMOTO Yasuhiro

  Electronics Research Laboratory, Matsushita Electronics Corporation

• AZUMA Masamichi

  Electronics Research Laboratory, Matsushita Electronics Corporation

• Hayashi Shinichiro

  Electronics Research Laboratory, Matsushita Electronics Corporation

• Katsu Shin-ichi

  Electronics Research Laboratory, Matsushita Electronics Corporation

• Kano Gota

  Electronics Research Laboratory, Matsushita Electronics Corporation

• Araujo Carlos

  Microelectronics Research Laboratory, University of Colorado

• ARITA Koji

  ULSI Device Development Laboratory, NEC Corporation

• Nasu Toru

  Electronics Research Laboratory Matsushita Electronics Corporation

• Kano G

  Electronics Research Laboratory Matsushita Electronics Corporation

• Kano Gota

  Electronics Research Laboratory Matsushita Electronics Corporation

• Otsuki T

  Panasonic Technol. Inc. Co Usa

• Araujo Carlos

  Microelectronics Research Laboratory University Of Colorado

• Katsu Shin-ichi

  Electronics Research Laboratory Matsushita Electronics Corporation

• Uemoto Y

  Electronics Research Laboratory Matsushita Electronics Corporation

• Azuma M

  Electronics Research Laboratory Matsushita Electronics Corporation

• Azuma Masamichi

  Electronics Research Laboratory Matsushita Electronics Corporation

• Matsuda Akihiro

  Electronics Research Laboratory Matsushita Electronics Corporation

• ASARI Koji

  The authors are with Electronics Research Laboratory, Matsushita Electronics Corporation

• 嶋田 豊

  富山医科薬科大学医学部和漢診療学

• Uemoto Yasuhiro

  Electronics Research Laboratory Matsushita Electronics Corporation

• Otsuki Tatsuo

  Electronics Research Laboratory Matsushita Electronics Corporation

• Nagano Yoshihisa

  Electronics Research Laboratory Matsushita Electronics Corporation

• Hayashi Shinichiro

  Electronics Research Laboratory Matsushita Electronics Corporation

• Shimada Yasuhiro

  Electronics Research Laboratory Matsushita Electronice Corporation

• Asari Koji

  The Authors Are With Electronics Research Laboratory Matsushita Electronics Corporation

• Inoue A

  Microwave Device Development Department Mitsubishi Electric Corporation

• Fujii Eiji

  First Department Of Oral And Maxillofacial Surgery Faculty Of Dentistry Tokyo Medical And Dental Uni

• Fujii Eiji

  Research Laboratories Ii Tamanoi Vinegar Co. Ltd.

• Hayashi Shose

  Electronics Research Laboratory Matsushita Electronics Corporation

• Hayashi S

  Tokyo Univ. Mercantile Marine Tokyo Jpn

• Arita K

  Ulsi Device Development Laboratory Nec Corporation

• Azuma Mitsuhiro

  Fujitsu Laboratories Limited

• Azuma Mitsuhiro

  Electronics Research Laboratory Matsushita Electronics Corporation

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