Preparation of High-Conductivity p-Type a-Si:H Films by Penning Discharge
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1981-12-05
著者
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Hiramatsu Takahiro
Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850
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Hirao T
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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MORI Koshiro
Materials Research Laboratory, Matsushita Electric Industrial Co., Ltd.
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KITAGAWA Masatoshi
Materials Research Laboratory, Matsushita Electric Industrial Co., Ltd.
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HIRAO Takashi
Materials Research Laboratory, Matsushita Electric Industrial Co., Ltd.
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ISHIHARA Shinichiro
Materials Research Laboratory, Matsushita Electric Industrial Co., Ltd.
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OHNO Masaharu
Materials Research Laboratory, Matsushita Electric Industrial Co., Ltd.
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Mori K
Saga Univ. Saga Jpn
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Ohno Masaharu
Materials Research Laboratory Matsushita Electric Industrial Co. Ltd.
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Kitagawa M
Matsushita Electric Ind. Co. Moriguchi Jpn
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Kitagawa M
Matsushita Electric Industrial Co.
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Kitagawa M
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Kitagawa Masatoshi
Corporate Production Engineering Laboratories Matsushita Electric Ind.co. Ltd.
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Ishihara Shinichiro
Materials Research Laboratory Matsushita Electric Industrial Co. Ltd.
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